Nano indentation system based on scanning electron microscope

Abstract

The invention relates to a nano indentation apparatus based on scanning electron microscope, belonging to the low nano material stress state combination property test field. The invention is characterized in that the nano indentation apparatus comprises a pedestal and a sample substrate and an indentation head supporting seat, a set of angle regulating device, a set of triaxial translation rough adjustment device and a set of triaxial micropositioner are additionally arranged on the sample substrate, so as to move a sample to 2-00Mum away from the indentation head point and cause the sample to be over against the indentation head, the micropositioner of the indentation head is utilized to realize indentation operation, point indentation depth and stress measurement is realized by a strain gage in the interior of the indentation head and a piezoresistor as well as a stress-strain tester, relation of the stress and texturing mechanism is revealed by combining an emphasis-scanning high-resolution imaging system, and the nano indentation apparatus can be used for research of optic and electric properties of material under the action of stress. The invention has simple structure, low price and reliable performance and can realize indentation operation of material and research of mechanic al properties.

Description

technical field [0001] The invention relates to a nano-indentation system based on a scanning electron microscope. The nanoindentation system measures the signal of the force exerted by the tip of the indenter on the sample and the depth of the indentation through a Wheatstone bridge composed of piezoresistors. At the same time, the nano-indentation system can be well coupled in the scanning electron microscope, and the high-resolution imaging system of the scanning electron microscope can be used to observe the change of the shape and structural information of the sample in situ when it is subjected to external force, which belongs to the field of in-situ testing of nanomaterials . Background technique [0002] In recent years, nanomaterials (such as nanowires, nanobelts, nanofilms, nanorods, etc.) have attracted more and more attention due to their excellent mechanical, electrical, and optical properties. However, as the basic components of nano-devices in the future, th...

AI Technical Summary

Problems solved by technology

This method only qualitatively gives the relationship between the force and the electrical conductivity of the material, and cannot quantitatively give how much force is applied or how much strain occurs that can lead to changes in the electrical conductivity of the material.

[0006] The above methods cannot intuitively give the stress applied to the material, so it is difficult to analyze the mechanical properties of the material

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