Coaxial high-temperature cofiring ceramic microburner and processing mode thereof

Abstract

The invention relates to a coaxial high-temperature cofiring ceramic microburner and a processing method thereof. Unique processing materials and processing technology realize the processing of a middle micro size coaxial microburner with a complex inner cavity structure and the function of mechanical and electrical integration according to specific processes. Combined with the special design and the structural concept via many times of test verification, the microburner can realize reliable ignition and continuous stable burning of 'hydrogen / oxygen' under small flow condition, can also be used as a micro energy generating device to be applied in the micro actuation field or the aerospace boost field, and has the potential of industrialized large-scale production due to the characteristics of the processing method.

Description

【Technical field】 [0001] The invention relates to a micro-burner device based on high-temperature co-fired ceramic processing technology and a processing method thereof, which can be used as a micro-energy generating device in the field of micro-actuation or aerospace micro-propulsion, and has the potential for industrialized large-scale production. 【Background technique】 [0002] In recent years, with the increase in the research enthusiasm of small energy generators, more and more researches have been done on combustion, reaction and their applications under mesoscale and microscale conditions. However, when the feature size is reduced to a certain extent (millimeter level), it will be difficult to process tiny burners or reactors using traditional processing methods. Although special EDM can achieve high machining accuracy, its processing materials are limited to metals or semiconductors, and it is impossible to process more complex internal cavity structures, nor can it ...

AI Technical Summary

Problems solved by technology

However, when the feature size is reduced to a certain extent (millimeter level), it will be difficult to process tiny burners or reactors using traditional processing methods

Although special EDM can achieve high machining accuracy, its processing materials are limited to metals or semiconductors, and it is impossible to process more complex internal cavity structures, nor can it embed conductive subsystems in it, which is not conducive to the development of mechatronics. implement

Integrated circuit processing technology based on silicon wafer processing technology has incomparable advantages in traditional processing in terms of mechatronics and large-scale processing, but the materials used in it can withstand very low temperatures (<500K), which cannot adapt to micro Requirements for continuous operation of the burner under high temperature conditions

On the other hand, reliable ignition of the burner under meso-microscale conditions is also a difficult problem in itself due to the small space.

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