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Laser three-dimensional scanning device and method

A laser 3D, scanning device technology, used in optics, nonlinear optics, instruments, etc.

Active Publication Date: 2010-06-16
珠海中科先进技术研究院有限公司
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Problems solved by technology

[0008] In view of this, it is necessary to solve the problem that the scanning speed of the femtosecond laser two-dimensional scanning device in the Z direction can only reach the order of milliseconds, and provide a laser three-dimensional scanning device with a scanning speed in the XYZ three-dimensional direction that can reach the order of microseconds. device

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  • Laser three-dimensional scanning device and method
  • Laser three-dimensional scanning device and method

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Embodiment Construction

[0036] The present invention will be further described in detail below in conjunction with the accompanying drawings and examples.

[0037] Figure 5 It is a schematic diagram of the laser three-dimensional scanning device. The laser three-dimensional scanning device includes a first transmission grating 27, a second transmission grating 28, a third transmission grating 29, a first acousto-optic deflector 23, a second acousto-optic deflector 24, a first lens 32, A first half-wave plate 30 , a second lens 33 , a third AOD 25 , a third lens 34 , a second half-wave plate 31 , a fourth lens 35 , a fourth AOD 26 , and a microscope objective lens 36 .

[0038] The first transmission grating 27 , the second transmission grating 28 and the third transmission grating 29 are used to realize temporal and spatial dispersion compensation of the femtosecond laser.

[0039] The first acousto-optic deflector 23 and the second acousto-optic deflector 24 are placed orthogonally, injecting sta...

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Abstract

The invention relates to a laser three-dimensional scanning device and a laser three-dimensional scanning method. The device comprises a first transmission grating, a second transmission grating, a third transmission grating, a first acoustic optic deflector, a second acoustic optic deflector, a first lens, a first half wave plate, a second lens, a third acoustic optic deflector, a third lens, a second half wave plate, a fourth lens, a fourth acoustic optic deflector and a micro objective, which are arranged along the direction of a light path. The method comprises the following steps: injecting periodical sound waves in the first acoustic optic deflector and the second acoustic optic deflector; and injecting chirped sound waves in the third acoustic optic deflector and the fourth acoustic optic deflector. The device realizes three-dimensional scanning by adopting the four acoustic optic deflectors; and because existing acoustic optic deflectors can completely reach microsecond acousto-optic interaction time, the device can completely realize microsecond quick scanning in XYZ three-dimensional directions.

Description

【Technical field】 [0001] The invention relates to a laser three-dimensional scanning device and a laser three-dimensional scanning method. 【Background technique】 [0002] Due to its short pulse duration, low single pulse energy, and high peak power, femtosecond lasers have been widely used in many fields such as microscopic imaging, optical storage, and microprocessing. However, the rapid three-dimensional scanning technology of femtosecond laser is still difficult to realize, which restricts its further popularization and application. The current laser scanning technology mainly has two deficiencies: (1), although the two-dimensional scanning speed in the XY direction can reach the order of microseconds, the scanning speed in the Z direction still stays at the order of milliseconds; (2), Existing laser scanning technology is mainly aimed at continuous laser light sources, rather than ultrashort pulse light sources such as femtosecond lasers. [0003] Based on the acousto-...

Claims

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Application Information

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IPC IPC(8): G02F1/33
Inventor 李德荣张春阳
Owner 珠海中科先进技术研究院有限公司
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