Direct heating type testing method of high temperature resistance of carbon/carbon heating elements

Abstract

The invention discloses a direct heating type testing method of high temperature resistance of carbon / carbon heating elements, comprising the following steps: 1. processing and manufacturing two graphite heads; 2. fixing the carbon / carbon heating elements on the two graphite heads; 3. sleeving a heat preservation and insulation layer on each carbon / carbon heating element; 4. placing the carbon / carbon heating elements into a furnace for testing and correspondingly installing the two graphite heads on positive and negative lead electrodes at the furnace bottom; 5. introducing protective gases into the furnace for testing; 6. adopting DC power supply to directly heat the carbon / carbon heating elements by electrifying through the positive and negative lead electrodes after electric conductionof the graphite heads, keeping recording the temperature of the carbon / carbon heating elements tested by a temperature testing device and the voltage value and current value of the corresponding DC power supply in the heating process and correspondingly drawing the resistance change rate curves of the carbon / carbon heating elements from normal temperature to high temperature. To sum up, the method of the invention is simple in steps, easy in operation and good in testing effects, and can accurately test the high temperature resistance of the carbon / carbon heating elements in different structures.

Description

technical field [0001] The invention belongs to the technical field of testing carbon / carbon composite heating element materials for polysilicon hydrogenation furnaces, and in particular relates to a direct heating method for testing the high-temperature resistance of carbon / carbon heating elements. Background technique [0002] The rapid development of the microelectronics industry represented by integrated circuits and the rapid development of the solar photovoltaic industry since 2004 have greatly stimulated the market sales of polysilicon used in the semiconductor industry. In the production of polysilicon, a large amount of tail gas is generated. If it is hydrotreated, the tail gas can be treated and reused. In polysilicon hydrogenation equipment (hydrogenation furnace), carbon / carbon composite materials are basically used as materials for heat generation, heat insulation, and heat preservation (so-called carbon / carbon thermal field materials). Carbon / carbon composites...

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Problems solved by technology

The high-temperature resistance test parameters of the carbon / carbon composite heating element are important indicators for determining the equipment selection of polysilicon enterprises. Due to the difficulty of testing the high-temperature resistance test parameters of the above-mentioned carbon / carbon composite heating element, it is now very difficult to test the domestic carbon / carbon composite heating elements. Manufacturers of carbon composite materials have not been able to provide a set of effective reference data

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