Test method of micro-accelerometer reliability intensifying test

Abstract

The invention relates to a test method of an MEMS type sensor-micro-accelerometer, in particular to a test method of micro-accelerometer reliability intensifying test. The method can find out the failure mode of the micro-accelerometer under the integrated stress environment of temperature, vibration and wetness, is convenient for product development, and improves the integrated capability of theproduct, comprising the following steps: 1. the intensifying test of the micro-accelerometer under temperature stress; 2. the intensifying test of the micro-accelerometer under the integrated stress of the temperature and the vibration; and 3. the he intensifying test of the micro-accelerometer under the integrated stress of the temperature, the vibration and the wetness. The method considers theaffect of the temperature, the vibration and the wetness to the inner stricture of the micro-accelerometer. By applying three stress-the temperature, the vibration and the wetness to the micro-accelerometer step by step, the method finds out the condition of the three stress before the micro-accelerometer function is invalid and when the micro-accelerometer function is invalid, so as to be convenient for solve the defect of the micro-accelerometer, improve the integrated capability and the reliability of the micro-accelerometer, and is good for developing new products-the micro-accelerometer with high reliability.

Description

technical field [0001] The invention relates to a testing method of a micro-accelerometer, a MEMS sensor, in particular to a micro-accelerometer reliability strengthening test testing method that takes into account the three stresses of temperature, vibration and humidity. Background technique [0002] With the progress of the society and the development of the country, the international competition is deepening and fierce. The market has higher and higher requirements for products, which require both high performance and high reliability. That is to say, during the entire use process of the product, it is necessary to ensure that the performance of the product is stable within the design life period. At present, due to the complexity and particularity of MEMS reliability and the lack of research on the reliability of micro-devices by researchers, the reliability indicators of MEMS devices are lacking; at the same time, due to the particularity of micro-inertial devices, con...

AI Technical Summary

Problems solved by technology

At present, due to the complexity and particularity of MEMS reliability and the lack of research on the reliability of micro-devices by researchers, the reliability indicators of MEMS devices are lacking; at the same time, due to the particularity of micro-inertial devices, conventional reliability tests have been unable to Meet the needs of its reliability verification