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Scribing device and scribing method

A scribing device and technology for cutting and scribing lines, applied in glass cutting devices, glass manufacturing equipment, glass production, etc., can solve problems such as inability to scribing lines, and achieve the effect of increasing the degree of freedom and reducing deterioration

Inactive Publication Date: 2009-11-18
MITSUBOSHI DIAMOND IND CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In order to overcome the shortcomings of the previous scribing device, the scribing is performed only by one of the above-mentioned outer cutting and inner cutting, and these combinations cannot be used to form a scribing line. The present invention provides a scribing device and a scribing method, which can Combining outer and inner cutting lines to draw lines

Method used

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  • Scribing device and scribing method
  • Scribing device and scribing method
  • Scribing device and scribing method

Examples

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Embodiment Construction

[0055] image 3 It is a schematic perspective view of an example of a scribing device according to an embodiment of the present invention. The moving table 101 of the scribing device 100 is held so as to be movable in the y-axis direction along a pair of guide rails 102a, 102b. The ball screw 103 is screwed with the moving table 101 . The ball screw 103 is rotated by the drive of the motor 104 to move the moving table 101 in the y-axis direction along the guide rails 102a and 102b. A motor 105 is provided on the mobile platform 101 . The motor 105 rotates the platform 106 on the xy plane to be positioned at a predetermined angle. Here, the brittle material substrate 107 is assumed to be a low-temperature fired ceramic substrate. The brittle material substrate 107 is placed on the stage 106 and held by a vacuum suction means not shown in the figure. Two CCD cameras 108a and 108b for imaging the alignment marks of the brittle material substrate 107 are installed on the uppe...

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Abstract

The present invention provides a scribing device and a scribing method, for fragile material, capable of setting interior contact and exterior contact etc. A fragile material substrate is configured on a bench, such that the bench moves in Y axis direction freely and rotates freely by means of a motor. Further, the scribing head moves freely in X axis direction. Prescription data table of set interior contact and exterior contact is stored. Therefore, it can be carried out to scribe the interior contact and exterior contact according to the prescription data table.

Description

technical field [0001] In particular, the present invention relates to a scribing device and a scribing method for cutting brittle material substrates such as low-temperature fired ceramic substrates. Background technique [0002] Low-temperature firing ceramics (hereinafter referred to as LTCC) are substrates made of a multilayer film formed by conducting conductor wiring on a thin plate of mixed alumina and glass material, and fired at a low temperature of about 800°C. The LTCC substrate is used to form multiple grids on multiple functional areas on a mother substrate at the same time, and divide these functional areas into small substrates. Conventionally, a cutting tool is used to divide a mother substrate, and the cutting is performed mechanically so as to break it. [0003] One of the conventional scribing methods for scribing a brittle material substrate is a scribing method for scribing from the outside to the outside of a brittle material substrate as disclosed in ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B25H7/02B25H7/04
CPCC03B33/027C03B33/03C03B33/033C03B33/037Y02P40/57
Inventor 曾山正信
Owner MITSUBOSHI DIAMOND IND CO LTD
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