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Vertical cavity surface emitting laser capable of controlling outer cavity polarization

A technology of vertical cavity surface emission and polarization control, which is applied in the field of VCSEL and can solve problems such as complex polarization modes and uncontrollable polarization direction of outgoing light

Active Publication Date: 2009-09-02
吉光半导体科技有限公司
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  • Abstract
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AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to solve the uncontrollability of the polarization direction of the outgoing light of the current VCSEL device, especially the defect that the polarization mode of the VCSEL is complicated when it works under high current, and proposes a vertical cavity surface emitting laser with external cavity polarization control. Simple technical means to achieve stable VCSEL polarization effect

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  • Vertical cavity surface emitting laser capable of controlling outer cavity polarization

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Embodiment Construction

[0010] The structure of the present invention will be further described in detail in the following embodiments given in conjunction with the accompanying drawings.

[0011] refer to figure 1 , a vertical cavity surface emitting laser with external cavity polarization control, mainly including p-type DBR layer 2, active layer 5, n-type DBR layer 6, GaAs substrate 7, p-type DBR layer coated on p-type DBR layer 2 The surface electrode 1, the n-face electrode 8 laid on the bottom of the GaAs substrate 7, and the external cavity high reflection mirror 10 arranged on the optical axis of the outgoing light are characterized in that there is also an external cavity high reflection mirror 10 between the outgoing light window and the external cavity high reflection mirror 10 An amorphous silicon grating 9 is provided.

[0012] The main steps of the manufacturing process of the VCSEL device of the present invention are as follows: on the VCSEL epitaxial wafer, the photolithography, corr...

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Abstract

The invention relates to a vertical cavity surface emitting laser, in particular to a vertical cavity surface emitting laser capable of controlling outer cavity polarization. The laser mainly comprises a p type DBR layer, an active layer, an n type DBR layer, a GaAs substrate, a p electrode, an n electrode and an outer cavity high-reflection mirror, wherein the p electrode is coated on the p type DBR layer, the n electrode is laid at the bottom of the GaAs substrate, and the outer cavity high-reflection mirror is arranged on the optical axis of the emergent light. The invention is characterized in that an amorphous silicon grating is also arranged between the window of the emergent light and the outer cavity high-reflection mirror. With the outer cavity structure, the vertical cavity surface emitting laser capable of controlling outer cavity polarization can better stabilize and control the polarization characteristics of output light to obtain a higher polarization selection ratio; meanwhile, the output power of linear polarization light is improved.

Description

technical field [0001] The invention relates to a vertical cavity surface emitting laser (VCSEL), in particular to a VCSEL capable of controlling the polarization direction. Background technique [0002] In the field of laser display light sources, most of the laser light sources currently used use high-power edge-emitting semiconductor lasers to pump all-solid-state lasers, and then generate blue and green light through frequency conversion, and use high-power VCSELs to directly perform external frequency doubling. has many advantages. To efficiently perform extracavity frequency doubling, it is very important that the fundamental frequency light of the VCSEL has a stable and controllable polarization direction. [0003] General VCSELs are grown on (001) substrates, have a good cylindrical symmetry structure, and theoretically lase linearly polarized light in any direction, so the polarization direction of the outgoing light is uncontrollable. In addition, with changes in...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S5/183H01S5/14G02B5/18H01S5/0683
Inventor 王伟宁永强秦莉刘云王立军
Owner 吉光半导体科技有限公司
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