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Anti-runout cooperated target laser rotation angle and speed measuring method and apparatus

A radial runout and cooperative target technology, which is applied to devices using optical methods, measuring devices, and optical devices, etc., can solve the problem that the rotating body cannot be measured with high precision, achieve high-precision real-time measurement, improve measurement accuracy, Effect of Improving Harmonic Suppression Characteristics

Inactive Publication Date: 2010-09-22
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology

[0009] The first purpose of the present invention is to solve the problem that the rotating body with large radial runout cannot measure the high-precision rotation angle, and propose a laser rotation angle and speed measurement method for the cooperative target that is resistant to radial runout. This method takes the grating as the cooperative target and uses Two laser beams irradiate the grating installed on the rotating body, and the Doppler frequency shift effect of the two-way grating diffracted light along the radial direction of the rotating body is not sensitive to the radial runout of the rotating body, and then achieve high precision through interference detection technology Angle measurement

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  • Anti-runout cooperated target laser rotation angle and speed measuring method and apparatus
  • Anti-runout cooperated target laser rotation angle and speed measuring method and apparatus
  • Anti-runout cooperated target laser rotation angle and speed measuring method and apparatus

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Embodiment

[0045] Such as Figure 4 As shown, an angle measurement method for anti-rotating body radial runout, the measurement steps are:

[0046] First, the laser light of the wavelength λ=632nm laser 8 is coupled into the optical fiber 9, and after passing through the fiber splitter 10, two measurement optical paths are formed, and one path passes through the optical fiber 11 and the first collimating mirror 15, and then emits the first collimated laser light 5 , the other laser beam passes through the optical fiber 12, the 20Mhz frequency shifter 13, the optical fiber 14 and the second collimating mirror 16 in turn, and then emits the second collimated laser 6; the two collimated lasers irradiate the grating scale installed on the circumference of the rotating body 1 2. Calculated according to formula (1), the angle between the two collimated laser beams and the normal to the surface of the grating scale 2 is 50.8°, and the two collimated laser beams diffract on the grating scale sur...

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Abstract

The invention belongs to the technical field of optical precision measurement, and relates to a method and a device for measuring the laser rotative angle and the velocity of a cooperative target resisting radial runout. The method is to take a grating as the cooperative target, use two laser beams to irradiate the grating which is arranged on a rotor, utilize the characteristic that the Doppler shift effect of two paths of diffracted grating light along the radial direction of the rotor is not sensitive to the radial runout of the rotor, and realize the measurement of the high-precision rotative angle through interference detection technology. The invention integrates grating diffraction, the Doppler effect, the interference detection technology and error separation technology, can measure the high-precision rotative angle, the angular velocity and the angular acceleration of the rotor with large radial runout, and provides precise and quick angle data for the realization of high-precision rotation control of a large electromechanical rotative angle system.

Description

technical field [0001] The invention belongs to the technical field of optical precision measurement, and can measure high-precision angle, angular velocity, and angular acceleration for a rotating body with large radial runout, and provide accurate and fast angle data for realizing high-precision rotation control of a large-scale electromechanical angle system. technical background [0002] Rotation angle measurement sensors are widely used in electromechanical systems, especially the acquisition of the rotation angle value of the rotating shaft in large electromechanical turntables, and the motion control of large multi-dimensional turntables are inseparable from rotation angle measurement sensors. However, the angle measurement sensors widely used in electromechanical angle systems, such as grating angle encoders, inductive synchronous angle sensors, and magnetic grid angle measurement sensors, have the disadvantages of limited gap change between dynamic and static scales ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/26G01P3/36
Inventor 赵维谦孙若端邱丽荣
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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