Pentaprism combination ultralong focal-length measurement method and apparatus
A measurement method and measurement device technology, applied in the direction of testing optical performance, etc., to achieve the effects of improving resolution, compressing the length of the measurement optical path, and reducing the depth of focus
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[0043] Such as figure 2 Shown, a kind of pentaprism combined ultra-long focal length measurement method, its measurement steps are:
[0044] (a) Use a near-infrared 1064 μm laser to irradiate a slit as the alignment target 9. After the outgoing light is converged by the reference lens 5 and refracted by the pentaprism 2, it is imaged on the CCD detector 11 through the collimator 12. At this time, the translation stage 13 drives the alignment target 9 to scan and move in the direction of the optical axis of the reference lens 5, and when it moves to a new scanning position, it judges whether it coincides with the second focus position 8 by translating the pentaprism 2.
[0045] The judgment method is as follows: Figure 4 As shown, when there is a defocus amount 18 between the scanning position where the slit is aligned with the target 9 and the second focus position 8, the translation stage 17 drives the pentaprism 2 to translate in the direction of the CCD detector 11, and th...
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