Reduction reaction furnace for polysilicon

Abstract

The invention provides a polysilicon reduction reaction furnace, which comprises a furnace body, an electrode arranged in the furnace body and a silicon core connected with the electrode, an air inlet, an air outlet, an active furnace door arranged on the opening of the furnace body, and an electrode tray which is separated with the furnace body but moves or are fixed. The central axis of the furnace body is arranged along the horizontal direction. The reduction reaction furnace is used for producing polysilicon, which can easily expand the scale of production, shortens the production period, saves production cost, and increases the yield and productivity effect.

Description

technical field [0001] The invention relates to a silicon production device, in particular to a polysilicon reduction reaction furnace. Background technique [0002] At present, the production method of polysilicon generally uses quartz sand to be smelted and purified to 98% in an electric arc furnace to produce industrial silicon; then the industrial silicon is crushed and mixed with anhydrous HCl in a fluidized bed reactor at a temperature of about 300 °C. Medium reaction to generate easily soluble SiHCl 3 , while forming a gaseous mixture (H 2 , HCl, SiHCl 3 、SiCl 4 , Si). The above-mentioned gaseous mixture is then further purified and decomposed, and the purified SiHCl is purified 3 Using high-temperature reduction process, with high-purity SiHCl 3 in H 2 Reductive deposition in the atmosphere to generate polysilicon. [0003] The above-mentioned chemical vapor deposition process is carried out in a reduction furnace. Usually, the reduction furnace includes a fu...

AI Technical Summary

Problems solved by technology

During the production process, it is necessary to open the furnace body (lift the furnace body with a crane), install and process the silicon rods, and then cover the furnace body after installation and processing (put it back with a crane). This process is time-consuming and labor-intensive.

If the production efficiency is improved, the production of silicon rods needs to be lengthened, and the silicon rods installed on the chassis must be placed vertically, otherwise the production of silicon rods is unstable and prone to breakage, so a higher factory building is required

It is more troublesome to open and put back the furnace body greater than 2 meters high. If the production scale is expanded, the factory building will be expanded higher. Therefore, it is difficult to expand the production scale with a reduction furnace of this structure; The furnace body must be opened when the silicon core is installed, which makes the production cycle longer and the production efficiency lower, which is not suitable for high-efficiency large-scale production

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