Cell separation microchip based on silicon structure on insulators
A silicon-on-insulator and microchip technology, which is applied in the field of microchips for cell screening and separation, can solve the problems of weak electric field strength and electric field gradient, weak anti-corrosion and anti-oxidation ability, and affect the biological activity of cells, so as to reduce physical damage , low cost and mature processing technology
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[0043] see figure 1 , 2 and 3, the microchip is composed of two layers bonded to each other, layer I is the channel layer 1, and layer II is the cover layer 2. The channel layer is a microstructure formed by etching grooves on the SOI silicon wafer using MEMS processing technology. The channel layer 1 has a main microchannel 3, a microchannel 9 connecting the main microchannel and the fusion cell pool, a sheath fluid channel 10, and a sample Pool 4, sheath flow pool 5, waste liquid pool 16, fusion cell pool 6, optical fiber groove 7 and microelectrode pair 8 structures, the sample pool 4 on the channel layer 1 is used for the storage of the sample liquid before screening; the main microchannel 3. The microchannel 9 and the sheath flow channel 10 are kept unblocked for sample (cell suspension or solution) flow, and the optical fiber located in the optical fiber groove 7 provides an optical detection path; the microelectrode pair 8 realizes cell screening. The cover layer 2 is...
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