Packaging body
A packaging body and packaging box technology, applied in packaging, semiconductor/solid-state device manufacturing, electrical components, etc., can solve the problems of large packaging body size, large storage space, reuse or recycling obstacles, etc., to achieve expansion of storage space, The effect of improving strength or rigidity and suppressing surrounding contamination
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no. 6 approach
[0093] then, Figure 12 The sixth embodiment of the present invention is shown. In this case, the substrate storage container 10 is not a front-opening cassette type in which semiconductor wafers W with a diameter of 300 mm are arranged and stored, but a top-opening cassette type in which semiconductor wafers W with a diameter of 200 mm are arrayed and stored. type.
[0094] This type of substrate storage container 10 includes: a substantially bottomed square cylindrical container body 11A; an inner box 26 that is detachably accommodated in the container body 11A from above and accommodates a plurality of semiconductor wafers W in a row via an arrangement groove; The upper lid 15A of the opening of the container body 11A is opened and closed via the ring-shaped packing 27 . Inside the cover body 15A, an elastic pressure plate 28 for holding the upper peripheral edge of each stored semiconductor wafer W is attached. The description of other parts is omitted since they are the...
Embodiment 1
[0102]The package of Example 1 is the type of the first embodiment. The substrate storage container was a front-opening cassette type in which 25 silicon wafers with a diameter of 300 mm were stored, and was packaged with the lid facing upward. In addition, the package body of Example 2 is the type of 2nd Embodiment, and a board|substrate storage container is the same as Example 1. In addition, the package body of Example 3 is the type of 3rd Embodiment, and a board|substrate storage container is the same as Example 1.
[0103] On the other hand, the package of the comparative example is a type in which a pair of reinforcement members are removed from the type of the third embodiment, and the substrate storage container is the same as that of the first embodiment.
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