Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Differential capacitance type micromechanical accelerometer

A differential capacitance and accelerometer technology, applied in the field of inertial sensors, can solve the problem of insufficient sensitivity and resolution, and achieve the effects of improving sensitivity and resolution, simple processing technology, and realizing overload protection.

Inactive Publication Date: 2008-05-28
ZIGUANG COMM TECH
View PDF2 Cites 20 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to overcome the shortcomings of the existing technology that the sensitive mass is too small, and provide a high-sensitivity differential capacitive micro-mechanical accelerometer with simple structure, large mass, and comb-shaped electrodes formed by planar technology, to solve the problem of The sensitivity and resolution of existing micromachined accelerometers are not high enough

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Differential capacitance type micromechanical accelerometer
  • Differential capacitance type micromechanical accelerometer

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0019] A kind of differential capacitive micromachined accelerometer that the present invention proposes is described in detail as follows in conjunction with accompanying drawing and embodiment:

[0020] The structure of the present invention is shown in Figure 2 and Figure 3, including a substrate 1, a fixed electrode 2, a mass block 3, a movable electrode 4, a movable electrode lead 5, an insulating layer 6, a folding beam 7, a column 8, an anti-suction Close stop gear 9, anti-impact stop gear 10. The mass block 3 is composed of a silicon wafer as the main body and adopts an integral cuboid, and the movable electrodes 4 are arranged equidistantly on the silicon wafer, and the movable electrodes 3 are separated by an insulating layer 6. Elastic support, the folding beam is connected to the substrate 1 through the column 8, so that the plane of the movable electrode 4 is parallel to the substrate 1, and the substrate 1 is made of a glass substrate, and is arranged on the subs...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a differential-capacitive type mems accelerometer, which belongs to the inertia sensor field of a micro electric system (MEMS). The accelerometer comprises a sensitive quality component which is composed of a silicon chip, an insulating layer, and movable electrodes, fixing electrodes, a base piece, and a folding beam. The movable electrodes are distributed in equal distance on the silicon chip, the insulating layer is used to separate each movable electrode in space, the folding beam is arranged on two ends of the sensitive quality component and is fixed on the base plate through a vertical prop, thereby whole surfaces of the movable electrodes are pending and in parallel, the fixing electrodes are distributed in equal distance on the base plate and are arranged crisscross with the movable electrodes to form a group of differential-capacitive capacitances. The invention increases greatly sensitive quality of a quality block, thereby sensitivity and distinguish ability are increased greatly. The invention has simple structure, and uses integrated circuit plane manufacturing technique to process the movable electrodes and the fixing electrodes. The invention has low cost, simple manufacturing technique, high reproducibility, and high rate of finished products, and is easy to be produced in batches.

Description

technical field [0001] The invention belongs to the field of inertial sensors in micro-electromechanical systems (MEMS), in particular to a differential capacitive micro-machine accelerometer, which can be widely used in motion state measurement and control of automotive electronics, aerospace, and weaponry. Background technique [0002] The measurement and control of the motion state of objects has a wide range of applications in the fields of civilian products and defense products. Accelerometers are mainly used to measure the motion parameters of moving objects relative to inertial space. Traditional accelerometers are limited by factors such as volume, weight and cost, and it is difficult to popularize and apply them in the civilian field. Micromachined accelerometers based on integrated circuit (IC) technology and precision machining technology have outstanding advantages such as small size, light weight, low cost, and high reliability. More, so it can be used in a wid...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/125
Inventor 高宏丁炜毕国楦胡向阳董景新张嵘
Owner ZIGUANG COMM TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products