Differential capacitance type micromechanical accelerometer
A differential capacitance and accelerometer technology, applied in the field of inertial sensors, can solve the problem of insufficient sensitivity and resolution, and achieve the effects of improving sensitivity and resolution, simple processing technology, and realizing overload protection.
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[0019] A kind of differential capacitive micromachined accelerometer that the present invention proposes is described in detail as follows in conjunction with accompanying drawing and embodiment:
[0020] The structure of the present invention is shown in Figure 2 and Figure 3, including a substrate 1, a fixed electrode 2, a mass block 3, a movable electrode 4, a movable electrode lead 5, an insulating layer 6, a folding beam 7, a column 8, an anti-suction Close stop gear 9, anti-impact stop gear 10. The mass block 3 is composed of a silicon wafer as the main body and adopts an integral cuboid, and the movable electrodes 4 are arranged equidistantly on the silicon wafer, and the movable electrodes 3 are separated by an insulating layer 6. Elastic support, the folding beam is connected to the substrate 1 through the column 8, so that the plane of the movable electrode 4 is parallel to the substrate 1, and the substrate 1 is made of a glass substrate, and is arranged on the subs...
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