Uniaxial micro-tensile test piece for thin film mechanical performance test

A micro-stretching and thin-film technology, which is applied in the field of uniaxial micro-stretching specimens, can solve the problems of non-silicon materials that are not suitable for measuring large plastic deformation, unsuitable for routine operations, and limited application scope, and achieves high yield, High verticality and the effect of solving measurement errors

Inactive Publication Date: 2008-03-26
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Its disadvantage is that it is not suitable for measuring non-silicon materials with large plastic deformation due to the high rigidity of the support beam of the micro-tensile sample.
And the whole test system must be placed in SEM or TEM for observation and measurement, which is not suitable for routine operation, and the application range is greatly limited

Method used

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  • Uniaxial micro-tensile test piece for thin film mechanical performance test

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] Example 1 has a micro-tensile specimen structure with silicon and nickel U-shaped support structures.

[0022] As shown in FIG. 1 , this embodiment includes: a U-shaped support platform 1 , a mobile platform 2 , a snake-shaped support spring 3 , a centering mark 4 , and a displacement mark 5 . The serpentine support spring 3 is connected to the U-shaped support platform 1 and the mobile platform 2, and the two ends of the film sample 6 are connected to the U-shaped support platform 1 and the mobile platform 2 in the air respectively. The centering mark 4 is located on the top of the mobile platform 2, and the displacement mark 5 is bonded to the tail end of the film sample 6 and the mobile platform 2. During the measurement, the U-shaped support platform 1 is fixed on the metal base, and the other end of the mobile platform 2 is connected to the The load sensors are connected to each other, and a tensile force in the horizontal direction is applied to the mobile platfor...

Embodiment 2

[0036] Embodiment 2 has a micro-tensile specimen structure with silicon and nickel U-shaped support platforms.

[0037] The material and structure of this embodiment are the same as those of Embodiment 1, but the dimensional parameters of each part are different.

[0038] In this embodiment, the lower layer of the U-shaped support platform 1 is monocrystalline silicon with a thickness of 500 microns, and the peripheral dimensions are 17 mm long, 17 mm wide, and the width of the support beam is 3 mm; the peripheral dimensions of the upper layer are 15 mm long, 15 mm wide, and the width of the support beam 2mm;

[0039] In this embodiment, the mobile platform 2 is 12.5 mm long and 2.5 mm wide, the thickness and material are the same as those of the U-shaped support platform, and the diameter of the front circular through hole is 1 mm;

[0040] In this embodiment, the serpentine support spring 3 has a line width of 50 microns, a thickness of 200 microns, an arc inner diameter of...

Embodiment 3

[0043] Embodiment 3 has the micro-tensile specimen structure of metal nickel U-shaped support platform.

[0044] As shown in FIG. 6 , the structure of the micro-tensile test piece in this embodiment includes: a U-shaped support platform 1 , a mobile platform 2 , a serpentine support spring 3 , a centering mark 4 , and a displacement mark 5 . The material and structure of other components are basically the same as those in Embodiment 1 except for the size parameters, the U-shaped support platform 1 and the mobile platform 2 which are all formed of electroplated nickel metal.

[0045] In this embodiment, the outer dimensions of the U-shaped support platform 1 are 14 mm long, 14 mm wide, 2 mm wide, and 450 microns thick;

[0046] In this embodiment, the mobile platform 2 is 10 mm long and 3 mm wide, with the same thickness and material as the U-shaped support structure, and the diameter of the front circular through hole is 1 mm;

[0047] In this embodiment, the serpentine suppo...

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Abstract

The single -shaft micro tensile test piece to test the film dynamic performance includes the U shpe supporting platform, movable platform, the snake supporting spring, centring marker, displacement marker. The snake supporting spring is connected with the U shape supporting platform and movable platform; the U shape supporting platform and movable platform are connected with two suspended ends of the film sample; the centring marker is on the top of the movable platform; the displacement marker is pasted to the tail to movable platform and near to the film sample. Compared to the present test piece, the process is available, it has good repeatability and high yield; also it has avoided the test error generated by the supporting girder deformation in tension process. The test piece of invention is proper for the film micro dynamic performance test of single metal, alloy and compound material.

Description

technical field [0001] The invention relates to a tensile test piece in the technical field of testing, in particular to a uniaxial micro-tensile test piece used for testing the mechanical properties of thin films. Background technique [0002] With the rapid development of micro-electromechanical systems, various thin-film materials are widely used in micro-devices. Since the structure of micro-devices is not a simple reduction in the size of traditional mechanical structures, when the size of the structure is reduced to the order of microns / nanometers, there will be obvious size effects. , leading to significant changes in the mechanical and physical properties of materials, so the microscopic mechanical properties of thin film materials are significantly different from the macroscopic mechanical properties of materials. The mechanical performance parameters measured by large-volume samples are far from meeting the design requirements of MEMS devices. The microscale mechan...

Claims

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Application Information

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IPC IPC(8): G01N3/00G01N13/00
Inventor 汪红刘瑞丁桂甫李雪萍杨春生
Owner SHANGHAI JIAO TONG UNIV
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