Optical interference measuring device and its method
A technology of optical interference and measuring devices, applied in the field of precision measurement, to achieve the effect of improving phase sensitivity
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[0019] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0020] The working principle of a general Michelson interferometer is as follows: the coherent light source generated by the laser 1 passes through a beam splitter to form two interference arms, and a phase sensing unit is installed on one of the arms, and the phase sensing unit can be a moving mirror 2, or It can be achieved by other methods. and the other as a reference arm. When the coherent light of the two arms interferes again, the phase difference of the two arms will lead to a change in the output light intensity. The light intensity measured by the detector 6 is finally used to obtain the phase change by using the relationship between the light intensity and the phase.
[0021] As shown in Figure 1, the optical interferometry device includes a laser 1, a first reflector 2, a first half-reflective beam splitter 3, a second reflector 4...
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