Air spring vibro-damping mount with magnetic suspension unit

Abstract

The air spring vibrating isolation base with the magnetic suspension unit includes the: the basal body, a group of air spring, the air feed system, the high controlling system, many magnetic suspension units, the low stiffness righting device. The input of the air feed system and the high controlling system are connected with each other. The output of the high controlling system is connected with every air spring; the magnetic suspension unit is connected to the air feed system. The magnetic suspension and the air spring are connected under the basal body in series to support it; the side of the basal body is installed with the low rigidity righting device. The invention can be proper for the super high air spring isolation base in the condition of not changing the bearing ability of the vibration separation system.

Description

technical field [0001] The invention belongs to the field of ultra-low frequency vibration isolation, in particular to an air spring vibration isolation foundation. Background technique [0002] The air spring vibration isolation foundation is widely used in the field of vibration isolation due to its good low-frequency vibration isolation effect, insensitivity to load changes, and long service life. With the continuous improvement of ultra-precision machining and measurement, micro-nano technology and VLSI manufacturing precision, higher requirements are put forward for the ultra-low frequency performance of vibration isolation. However, the current air spring vibration isolation foundation cannot balance the transverse and longitudinal ultra-low frequency vibration isolation performance due to the mutual coupling of the air spring's transverse and longitudinal stiffness, which largely limits its further application in the field of ultra-low frequency vibration isolation. ...

AI Technical Summary

Problems solved by technology

[0007] The invention proposes an air spring vibration isolation foundation with a magnetic levitation unit to meet the load-bearing capacity requirements of a super-large vibration isolation foundation, and can greatly increase the transverse vibration of the vibration isolation foundation without changing the load-carrying capacity of the vibration isolation system. , Longitudinal ultra-low frequency vibration isolation performance, which can effectively solve the problem that the existing air spring vibration isolation foundation cannot balance horizontal and vertical vibration isolation

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