Long-shape lamp container

A long-shaped lamp and container technology, applied in the direction of discharge lamps, parts of gas discharge lamps, electrical components, etc., can solve problems such as lamp breakage

Inactive Publication Date: 2007-10-03
ORC MFG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the process of inserting the inner tube into the outer tube, the inner tube and the outer tube are often damaged, which causes the lamp to break

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] Embodiment 1 of the present invention is the elongated lamp vessel of such constitution: the inner diameter of the outer tube is d 1 , the outer diameter of the inner tube is d 2 The duration is approximately (d 1 2 -d 2 2 ) 1 / 2 The retaining material is fixed on the outer cylindrical surface of the inner tube in a direction perpendicular to the axis, and fixes the inner tube and the outer tube coaxially.

[0026] Fig. 1 is a schematic diagram of an elongated lamp vessel of Embodiment 1 of the present invention. In FIG. 1 , an inner tube 1 is a cylindrical member made of glass. The outer tube 2 is a cylindrical member made of glass. The holding material 3 is a glass rod for holding the inner tube. The side wall 4 is a wall portion that fixes and connects the inner tube and the outer tube coaxially. The discharge gap 5 is a space where excimer discharge occurs.

[0027] The manufacturing method and function of the elongated lamp container of Embodiment 1 of thi...

Embodiment 2

[0032] Embodiment 2 of the present invention is the elongate lamp vessel of such constitution: when the inner diameter of outer tube is d 1 , the outer diameter of the inner tube is d 2 The duration is approximately (d 1 2 -d 2 2 ) 1 / 2 The two holding members are fixed to the outer cylindrical surface of the inner tube so as to intersect in the direction perpendicular to the axis, and fix the inner tube and the outer tube coaxially.

[0033] Fig. 2 is a schematic diagram of an elongated lamp container according to Embodiment 2 of the present invention. In Fig. 2, the holding material 6, 7 is a glass rod for holding the inner tube. Other structures are the same as in Embodiment 1.

[0034] The manufacturing method and functions of the elongated lamp container according to the second embodiment of the present invention constituted as described above will be described. In the center of the elongated inner tube 1, the holding material is fixedly mounted on the outer periph...

Embodiment 3

[0039] Embodiment 3 of the present invention is such an elongated lamp vessel: when the inner diameter of the outer tube is d 1 , the outer diameter of the inner tube is d 2 The duration is approximately (d 1 2 -d 2 2 ) 1 / 2 The four retaining materials are fixed on the outer cylindrical surface of the inner tube in a well-shaped intersection in the direction perpendicular to the axis, and fix the inner tube and the outer tube coaxially.

[0040] Fig. 3 is a schematic diagram of an elongated lamp container according to Embodiment 3 of the present invention. In FIG. 3, holding materials 8 to 11 are glass rods for holding the inner tube. Other structures are the same as in Embodiment 1.

[0041] The manufacturing method and functions of the elongated lamp container according to the third embodiment of the present invention constituted as described above will be described. In the center of the elongated inner tube 1, four retaining materials 8-11 are fixed on the outer cyl...

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PUM

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Abstract

The invention relates to an elongated lamp container. In elongated glass quasi molecule lamp, the disrepair of lamp and reduction of illuminance are prevented. In the said elongated lamp container, the elongated glass cylindraceous inner tube (1) and glass cylindraceous outer tube (2) are fixed in coaxial shape, and the holding material (3) for keeping the inner tube (1) not curved is set up. The holding material (3) is glass rod of the same material with outer tube (2). When the inner diameter of the outer tube (2) is d1, and the outer diameter of the inner tube (1) is d2, the length of the holding material (3)is almost (d12-d22)1 / 2. The holding material is fixed on the circumferential surface of the inner tube at the axis orthogonal direction. Thus, even if it is elongated lamp container quasi molecule lamp, the inner tube will not curve, the inherent discharging gap is ensured. The no-light lamp resulted from disrepair or rupture of the lamp is prevented, and the whole uneven illuminance of lamp will also not generate, thus the stable light lamp for a long time can be ensured.

Description

technical field [0001] The invention relates to an elongated lamp container, in particular to an elongated lamp container in which an inner tube and an outer tube are coaxially formed in an excimer lamp for photochemical reaction. Background technique [0002] The excimer lamp emits light with a wavelength of 172nm having strong cleaning power, so it is used to clean the surface of semiconductor wafers and the surface of glass for liquid crystal substrates. The glass used for liquid crystal substrates has been seeking to expand its width, and it has now increased to 1870mm×2200mm. Of course, the lamp for cleaning its surface is also extended to more than 2000mm. As shown in Figure 4(a), the excimer lamp is a double-tube structure. An excimer lamp, for example, has such a structure: the outer diameter of the outer tube is 30mm, the wall thickness is 1.2mm, the outer diameter of the inner tube is 18mm, and the wall thickness is 1.2mm, and the two glass tubes, the outer tube ...

Claims

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Application Information

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IPC IPC(8): H01J65/00
CPCH01J61/33H01J61/34
Inventor 屋木康彦
Owner ORC MFG
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