Method for extracting one-way harmonic wave of condenser type micro-gyroscope responsive signals and extraction apparatus therefor

Abstract

It is a harmonic wave extraction method and its apparatus of capacitor micro gyro single-path sensitive signals. The basic wave signals are output to the micro gyro capacitor electrode after magnification and let its positive and negative direct current separately bias located and connected to the ground. The sensitive capacitor electrode is connected to the ground and separately extracts sensitive signals from the electrode and differential amplify the signals by the amplifier after the anti-phase amplifier. The output signals can be turned into micro gyro sensitive signals after phase-sensitive rectifier and low magnification. The basic wave signals from the said basic signal generator serves as the control signals of the phase reference end of the phase-sensitive rectifier after double frequency and phase deviation and its apparatus comprises the public capacitor electrode with micro gyro, drive capacitor electrode and sensitive capacitor electrode.

Description

technical field [0001] The invention relates to sensing technology, in particular to a single-channel harmonic extraction method and an extraction device for capacitive micro-gyroscope sensitive signals. Background technique [0002] The resonant micro-gyroscope uses the alternating electrostatic force between the capacitor plates to make the vibrator vibrate mechanically, and uses the Coriolis force generated by the rotational angular velocity to make the vibrator vibrate in the direction orthogonal to the driving direction. This quadrature vibration is detected by another set of sensing capacitors. The traditional signal conditioning method is to add a DC bias to the common electrode G, add a sinusoidal driving voltage with a difference of 180° to the C and D electrodes, and detect the capacitance change on the A and B electrodes. Since the static capacitance is very small, about 2pf, the capacitance change caused by the Coriolis force is even smaller, about 1%. A and B ...

AI Technical Summary

Problems solved by technology

It is difficult to stably separate the driving and sensitive two quadrature signals of the same frequency with high precision by using the phase-sensitive detection method

There are also many methods that use high-frequency signals as carrier waves to add to sensitive capacitors in an attempt to solve the coupling problem of the original same-frequency signals, but the effect is not ideal, and it also increases the complexity of the circuit.

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