Miniature anti-radiation electric field sensor
An electric field sensor, anti-radiation technology, applied in electrostatic field measurement and other directions, can solve the problems of poor reliability, low resolution, difficult packaging of movable structures, etc., to achieve the effect of improving reliability
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[0012] A kind of miniature anti-radiation electric field sensor for collecting electric field signal, comprises silicon substrate 1, is provided with insulating layer 11 on silicon substrate 1, is provided with (about 01 μm) n-type silicon 2 on the surface of insulating layer 11, in n Two heavily doped n-type contact regions 3 are implanted on the silicon 2, and an n-type channel 6 is provided between the two n-type contact regions 3, and the two n-type contact regions 3 are connected by an n-type channel 6 , on the n-type contact region 3 and the n-type channel 6 (about 50nm) SiO 2 Layer 4 is provided with a metal lead 5 on the heavily doped n-type contact region 3 .
[0013] After the two n-type heavily doped contact regions of the present invention add voltage, when there is an external electric field incident on the n-type channel of the electric field microsensor, the carriers (electrons) in the channel will increase accordingly, thereby making the channel The channel cu...
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