RF MEMS switch using change in shape of fine liquid metal droplet

a technology of liquid metal droplets and switch bodies, applied in the field of rf switch, can solve the problems of fine particles produced, limiting the power of transmitted signals, and the structure of rf mems switch is susceptible to shock, and achieves the effect of resisting shock and movemen

Inactive Publication Date: 2012-09-06
ELECTRONICS & TELECOMM RES INST +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0009]The present invention has been made in an effort to provide an RF MEMS switch using a fine liquid metal droplet, which operates quickly and is resistant to shock and movement.

Problems solved by technology

Moreover, the RF MEMS switch using the fine processing technology causes contamination and wear due to limitations on mechanical driving and solid-to-solid contacts, and therefore produces fine particles.
Because the RF MEMS switch using the fine processing technology forms a solid-to-solid contact the actual contact area is very small, thus limiting the power of transmitted signals.
Thus, the RF MEMS switch has a structure that is susceptible to shock, and has a low driving speed because it moves the entire fine liquid metal droplet.

Method used

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  • RF MEMS switch using change in shape of fine liquid metal droplet
  • RF MEMS switch using change in shape of fine liquid metal droplet
  • RF MEMS switch using change in shape of fine liquid metal droplet

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Embodiment Construction

[0032]The present invention will be described more fully hereinafter with reference to the accompanying drawings, in which exemplary embodiments of the invention are shown. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. The drawings and description are to be regarded as illustrative in nature and not restrictive. Like reference numerals designate like elements throughout the specification.

[0033]FIG. 1 is an exploded perspective view of an RF MEMS switch using a change in the shape of a fine liquid metal droplet according to a first exemplary embodiment of the present invention. Referring to FIG. 1, a radio frequency micro-electromechanical system switch 4 (hereinafter referred to as “RF MEMS switch” for convenience of description) according to the first exemplary embodiment of the present invention includes a first layer member 110, a second layer...

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Abstract

An RF MEMS switch using a fine liquid metal droplet is provided. The RF MEMS switch using a fine liquid metal droplet includes: a first layer member having a signal transmission line; a second layer member disposed on the first layer member, and having a chamber formed corresponding to the signal transmission line so as to induce a change in the shape of the fine liquid metal droplet and a through hole formed at one side of the chamber so as to bring the fine liquid metal droplet, whose shape is to be changed in the chamber, into contact or non-contact with the signal transmission line; an operating member disposed on the second layer member, and provided at an open side of the chamber so as to provide deformability to the fine liquid metal droplet through the open side of the chamber; and a third layer member for defining the position of the operating member, and coupled to the first layer member and the second layer member.

Description

BACKGROUND OF THE INVENTION[0001](a) Field of the Invention[0002]The present invention relates to an RF switch. More particularly, the present invention relates to an RF MEMS switch using a change in the shape of a fine liquid metal droplet, which changes an on / off or connection state of an RF signal.[0003](b) Description of the Related Art[0004]An RF MEMS switch is used to change an on / off or connection state of an RF signal. For example, there is an RF MEMS (radio frequency micro-electromechanical systems) switch fabricated by a fine processing technology.[0005]Moreover, the RF MEMS switch using the fine processing technology causes contamination and wear due to limitations on mechanical driving and solid-to-solid contacts, and therefore produces fine particles. Because the RF MEMS switch using the fine processing technology forms a solid-to-solid contact the actual contact area is very small, thus limiting the power of transmitted signals.[0006]Among various solutions to this pro...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): H01H59/00
CPCH01H29/28H01H2029/008H01H59/0009H01H35/24H01H35/26
Inventor KIM, JOONWONSON, SEONG-HOEOM, SOON YOUNGPARK, USUNGBAEK, SEUNGBUM
Owner ELECTRONICS & TELECOMM RES INST
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