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Piezoelectric Pump

a technology of pump and piezoelectric pump, which is applied in the direction of pump parameter, positive displacement liquid engine, machine/engine, etc., can solve the problems of insufficient fluid transportation, inability to transport fluid, and reduced reliability of check valves, so as to achieve reliable discharge, efficient bent, and increased discharging pressure

Inactive Publication Date: 2009-06-11
MURATA MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0011]Accordingly, an object of a preferred embodiment of the present invention is to provide a piezoelectric pump that has a simple structure and that can increase the discharging pressure.

Problems solved by technology

However, reliability of the check valves is reduced with use for a long period, and the fluid is not sufficiently transported because of adhesion of foreign substances, such as dust, to the check valves.
Further, when the piezoelectric element is driven at a high frequency, the check valves, to which foreign substances, such as dust, adhere, do not follow the driving, and transportation of the fluid is impossible.
Unfortunately, since a plurality of piezoelectric elements need to be arranged in a plane in the piezoelectric pump having this structure, the piezoelectric pump has a large size and a complicated structure.
Moreover, a driving circuit for sequentially driving the piezoelectric elements is complicated, and this increases the cost.
This makes it impossible to increase the discharging pressure.

Method used

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Examples

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Effect test

first embodiment

[0036]FIGS. 1 to 3 show a piezoelectric pump according to a first embodiment. FIG. 1 is a general perspective view of a piezoelectric pump according to the present invention, FIG. 2 is an exploded perspective view of the piezoelectric pump shown in FIG. 1, and FIG. 3 is a cross-sectional view, taken along line A-A in FIG. 1.

[0037]In this embodiment, a piezoelectric pump P has a structure in which a top plate 10 that forms a pump body, a diaphragm 20, and an annular presser plate 30 are stacked in order, and these stacked components are bonded together. The top plate 10 is shaped like a flat plate having rigidity. A first opening 11 is provided at the center of the top plate 10, and a plurality of second openings 12 are provided on the same circumference centered on the first opening 11. While eight second openings 12 are provided so as to ensure the flow rate herein, the number of second openings 12 can be arbitrarily set in accordance with the required flow rate.

[0038]The diaphragm...

second embodiment

[0053]FIG. 5 shows a pumping operation in a tertiary resonance mode according to a second embodiment of the present invention. The same components as those shown in FIG. 3 are denoted by the same reference numerals, and redundant descriptions thereof are omitted. While the second openings 12 are provided in the pump body 10 in the first embodiment, second openings 25 are provided in a diaphragm 20 in this embodiment. In this case, when driving is performed in a tertiary resonance mode, fluid can be drawn in from the second openings 25 on the back side of a piezoelectric pump and can be discharged from a first opening 11 on the front side. This structure is suitable for an air supply pump in a fuel cell or a cooling pump.

third embodiment

[0054]FIG. 6 shows a pumping operation in a tertiary resonance mode according to a third embodiment of the present invention. The same components as those shown in FIG. 3 are denoted by the same reference numerals, and redundant descriptions thereof are omitted. In this embodiment, a part of a pump body 10 extends outward from a diaphragm 20, and a second opening 16 shaped like a concave groove is provided on a lower side of an extending portion 15 so as to extend from an inner side of an outer peripheral portion to an outer side of the diaphragm 20. An inner edge of the second opening 16 is provided outside the outer periphery of a piezoelectric element 23 and inside a fixed outer peripheral portion of the diaphragm 20, and an outer edge thereof is open on the lower side from the extending portion 15. The second opening 16 does not always need to be shaped like a concave groove, and may be formed by a communicating hole that is open outside the piezoelectric element 23 and inside t...

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Abstract

A piezoelectric pump having a first opening in a center portion of a pump body, and a second opening apart from the center. An outer peripheral portion of a metal diaphragm is fixed to the pump body, and a piezoelectric element having a size that covers the first opening and does not cover the second opening is bonded to a back center portion of the diaphragm. By applying a voltage near the resonance frequency to the piezoelectric element, a portion of the diaphragm opposing the first opening and a portion of the diaphragm opposing the second opening are bent in opposite directions so that fluid is drawn in from one of the first opening and the second opening and is discharged from the other opening. Such a piezoelectric pump can increase the discharging pressure, and can reliably discharge the fluid even under a condition where the pressure on the discharging side is high.

Description

CROSS REFERENCE TO RELATED APPLICATIONS[0001]The present application is a continuation of International Application No. PCT / JP2007 / 073555, filed Dec. 6, 2007, which claims priority to Japanese Patent Application No. JP2006-332692, filed Dec. 9, 2006, the entire contents of each of these applications being incorporated herein by reference in their entirety.FIELD OF THE INVENTION[0002]The present invention relates to piezoelectric pumps, and more particularly, to a piezoelectric pump using a diaphragm that is bent by a piezoelectric element.BACKGROUND OF THE INVENTION[0003]Piezoelectric pumps are used as cooling pumps in small electronic devices, such as notebook personal computers, and fuel transportation pumps in fuel cells. A piezoelectric pump is a pump using a diaphragm that is bent by the application of voltage to a piezoelectric element, and has advantages of a simple structure, a low profile structure, and low power consumption. In a piezoelectric pump using a piezoelectric el...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): F04B17/00
CPCF04B43/04F04B45/04F04B43/046Y02E60/50F04B2201/0806F05B2280/10F05B2260/407F05B2210/11F04B45/047F04B45/045F04B43/028F05B2260/60Y10S417/00
Inventor KAMITANI, GAKUSUNAGA, MIDORI
Owner MURATA MFG CO LTD
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