Single step process for blanket-selective cvd aluminum deposition

Abstract

The present invention relates generally to an improved apparatus and process for providing uniform step coverage on a substrate and planarization of metal layers to form continuous, void-free contacts or vias in sub-half micron aperture width applications. In one aspect of the invention, a dielectric layer is formed over a conducting member. A thin nucleation layer is then deposited onto the dielectric layer prior to etching high aspect ratio apertures through the nucleation and dielectric layers to expose the underlying conducting member on the aperture floor. A CVD metal layer is then deposited onto the structure to achieve selective deposition within the apertures, while preferably also forming a blanket layer on the field. The present apparatus and process reduce the number of steps necessary to fabricate CVD metal interconnects and layers that are substantially void-free and planarized. The metallization process is preferably carried out in an integrated processing system that includes both a PVD and CVD processing chamber so that once the substrate is introduced into a vacuum environment, the metallization of the apertures to form vias and contacts occurs without the formation of oxides between the layers.

Description

[0001] This is a continuation-in-part of pending U.S. patent application Ser. No. 08 / 561,605 filed on Nov. 21, 1995 entitled "Low Temperature Integrated Metallization Process and Apparatus."[0002] 1. Field of the Invention[0003] The present invention relates to a metallization method and apparatus for manufacturing semiconductor devices, More particularly, the present invention relates to the selective Metallization of apertures in insulative layers to form void-free interconnections between conducting layers, including apertures such as contacts or vias in high aspect ratio sub-half micron applications, while preferably also forming a blanket layer on the insulative layer.[0004] 2. Background of the Related Art[0005] Sub-half micron multilevel metallization is one of the key technologies for the next generation of very large scale integration ("VLSI"). The multilevel interconnections that lie at the heart of this technology require planarization of interconnect features formed in h...

AI Technical Summary

Problems solved by technology

Therefore CVD of aluminum is a common method used to fill apertures however, there are two difficulties associated with filling high aspect ratio (height to width.gtoreq.2:1) apertures to form vias or contacts using blanket CVD methods.

First, CVD films grow from all sides in an aperture and a void or key-hole may form in the filled aperture comprising the via or contact resulting in a compromised device.

Second, the nucleation layer which must be deposited on the aperture walls to ensure deposition of the CVD layer thereon layer thereon further reduces the width of the aperture thereby increasing the difficulty of void-See filling of the aperture without voids.

It should be recognized Eat this void is very difficult to detect by regular cross sectional standard electron microscopy ("SEM") techniques, because some deformation occurs in soft aluminum during mechanical polishing of the slide preparation.

In addition, electric conductivity tests many times do not detect structural abnormalities such as voids because the metal forms a bridging layer through at least a portion of the aperture.

However, despite the generally positive electric conductivity tests, conduction through a contact having a void therein may, over time, compromise the integrity of the integrated circuit devices in which the void is formed.

Although a thin conformal layer of CVD Al can typically be deposited in high aspect ratio apertures for creating contacts and vias at low temperatures, continued CVD deposition to completely fill the apertures typically results in the formation of voids therein Extensive efforts have been focused on eliminating the voids in metal layers by modifying CVD processing steps and parameters,

However, in actual practice of the selective deposition process, there are almost always defects on the surface of the dielectric and on He sidewalls of the apertures which provide free electrons and thus also serve as nucleation sites for CVD Al growth, casing unwanted nodule formation on the surface 20 and the walls of the apertures.

However, these methods complicate the processing steps required to form the desired circuit structure and significantly increase the expense of the integrated circuit manufacturing process.

Likewise, some steps, such as CMP, cannot reach the sidewalls of the apertures.

In addition, adding steps to the overall process increases the likelihood that defects may result in the formed structures.

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