Micro photo-electro-mechanical gyro

Abstract

The invention relates to a device of testing the rotation angular speed, relating to the acoustic wave technique, especially providing a micro optical mechanical gyroscope, wherein it is formed by laser source, acoustic surface wave sensor, optical waveguide, electric optical modulator, detector and signal processing system; it is characterized in that: it uses refractive optical signal to measure the angular speed of gyroscope rotation; the interdigital transducer (IDT) generates acoustic surface wave to change the refractive index of medium to form density grid, to refract the optical transmitted in waveguide on the acoustic grid; since the matter will generate Ge force when rotation to change the frequency characteristic parameter of acoustic wave; and the detector receives the first refracted light, to read out the angular speed sensitive to the Ge force from the changes of light intensity and phase. The invention can resist to vibration and electromagnetic interference, with widetemperature application and higher accuracy then present MEMS gyroscope, to test the inertia test unit.

Description

Technical field: [0001] The invention relates to a micro-miniature inertial measurement device, in particular to a micro-optical electromechanical gyroscope. Background technique: [0002] The inertial navigation system (INS) is a key part of automatic navigation, positioning, orientation, and stability systems. Since its birth in the 1920s, it has occupied a dominant position in the fields of navigation, attitude control, etc., and the gyroscope is exactly the measurement in the inertial system. The core component of angular velocity. [0003] In recent years, in the inertial navigation device market, optical gyroscopes and micromechanical gyroscopes are more comprehensively superior in terms of convenience and price. Various experiments have proved that they have greater application advantages than mechanical gyroscopes, electrostatic gyroscopes, and magnetoelectric gyroscopes. Among optical gyroscopes, laser gyroscopes have an advantage in high-precision applications an...

AI Technical Summary

Problems solved by technology

The micromechanical gyroscope uses silicon, quartz and lithium niobate as the main matrix materials, and mainly adopts the suspension structure scheme and the surface acoustic wave structure scheme. The processing of the suspension structure is difficult and the equipment is expensive, which limits the cost reduction, while the surface acoustic wave The limitation of the structural scheme is that the gyro detects the change of electrical frequency, which is greatly affected by the environmental electromagnetic field, so the detection accuracy cannot be improved

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