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Detum error separating method of cylindricity instrument based on self characteristic reference

A technology of error separation and cylindricity, which is applied in the direction of instruments, measuring devices, mechanical counters/curvature measurement, etc., can solve problems such as lowering measurement accuracy, difficulty in unifying the measurement profile, inconsistent sensor characteristics, etc., and achieve the effect of improving repeatability

Inactive Publication Date: 2006-08-02
HARBIN INST OF TECH
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  • Summary
  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In response to this problem, the Chinese patent (application publication number CN1645033) discloses "a method and device for measuring cylindricity of a separable cylindricity instrument reference error", and proposes a combination of dual sensors and indexing measurement The error separation technology between references can It is better to separate the parallelism error between the guide rail and the axis of rotation of the main shaft, but for ultra-precision measurement, there are still two problems that cannot be ignored. One is that the use of dual sensors will inevitably bring about the inconsistency of the characteristics of the two sensors; The second is that it is difficult to ensure that the two probes are on the same measurement contour when the two sensors are installed on the same diameter, resulting in misalignment of the measurement lines and reducing the measurement accuracy
[0006] At present, the British Taylor Hobson company, which has been a world leader in the field of ultra-precision measurement technology, proposed to use the "dual sensor" method to eliminate the error between the references of the guide rail axis relative to the spindle rotation axis, but there are also differences in the measurement lines of the two sensors. overlap problem

Method used

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  • Detum error separating method of cylindricity instrument based on self characteristic reference
  • Detum error separating method of cylindricity instrument based on self characteristic reference
  • Detum error separating method of cylindricity instrument based on self characteristic reference

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] Select two measurement sections.

[0032] Select a standard cylinder of 75×300, take the number of measurement sections N=2, the number of sampling points in one week M=1024, take the measurement height H=250mm, and the distance between the sensor probe and the upper and lower end faces h=25mm.

[0033] In the first test round, the test piece, that is, the standard cylinder 2, is placed forward, see image 3 , Figure 1(a). The sensor 1 moves along the guide rail, respectively measures the circular contours of the upper and lower sections, and obtains the comprehensive error value of the circular contour of the measured section. There is a measurement sequence {V 1j} and {V 2j}(j=1, 2...j...M) and has the following relational formula:

[0034] V 1j = S 1 +R 1j +E 1 ·cos(θ j -α 1 ) (1)

[0035] V 2j = S 2 +R 2j +E 2 ·cos(θ j -α 2 ) (2)

[0036] where S 1 and S 2 Respectively,...

Embodiment 2

[0070] Take multiple measurement sections.

[0071] Choose a standard cylinder of 75×300, take the number of measurement sections N=30, the number of sampling points in one week M=1024, take the measurement height H=250mm, and the distance between the sensor probe and the upper and lower end faces h=25mm.

[0072] The steps are as follows:

[0073] In the first round, the standard cylinder is placed forward. see image 3 , the sensor 1 moves along the guide rail, and measures the cross-sectional circular profile of the standard cylinder at the height of 1, 2...i...N section by section, then the comprehensive error value of the measured cross-sectional circular profile is obtained, and there is a positive measurement sequence {V ij}(i=1, 2...i...N, j=1, 2...j...M), and have the following relational formula:

[0074] V 1 j ...

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Abstract

The present invention belongs to the field of precise instrument and measurement technology, and is especially combined reference error separating method for cylindricity instrument with self reference and self calibration characteristic. Single sensor is used for measurement, and the workpiece is twice measured first being set forwards and then being set backwards. Through simple data processing, the shape error of the measured workpiece and the inclination of the track relative to the rotating axis of the main shaft may be separated, and this makes it possible to eliminate the influence of the inclination on the precise cylinder measurement completely and to raise the precision of space motion reference for cylinder measurement by over one order of magnitude.

Description

technical field [0001] The invention belongs to the technical field of precision instrument measurement. In particular, a method for separating errors between benchmarks of a combined cylindricity measuring instrument with self-referencing and self-calibration features. Background technique [0002] The inter-reference error of cylindricity measuring instrument is the main part of the instrument's reference error, which has the greatest impact on the measurement accuracy of the instrument, and is difficult to find and remove. Due to the limitation of the technological level, the parallelism error between the guide rail axis and the rotation axis of the cylindricity measuring instrument can only reach the assembly accuracy of about 0.15μm / 100mm. Therefore, to further improve the measurement accuracy of the cylindricity measuring instrument, only rely on Improving the manufacturing accuracy of the reference system is not enough. [0003] In ultra-precision measurement, the s...

Claims

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Application Information

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IPC IPC(8): G01B5/20G01B21/20
Inventor 谭久彬黄景志薛梓杨文国金国良王雷赵维谦
Owner HARBIN INST OF TECH
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