Field emission device and a method of forming such a device
A field emission and emission device technology, which is applied in the direction of electrical components, the manufacture of discharge tubes/lamps, and parts of discharge tubes/lamps, etc. Waste of time and other problems, to achieve the effect of reducing the number of steps, improving control, and easy conduction
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[0037] A gate structure (triode structure) for a field emission device is produced by means of an embodiment of the method according to the invention. In FIG. 1, the manufacture of a field emission device 1 having a triode structure is described.
[0038] A substrate 2 , for example a glass plate, firstly has an electrically conductive layer in the form of a patterned cathode 4 . The cathode 4 will form the first electrode in the triode structure. Such as Figure 1A As shown, a layer 6 of liquid material is disposed over the substrate 2 and the cathode 4 . Layer 6 preferably has a thickness between 1 and 10 micrometers and is deposited on substrate 2 by means of spin-coating processes, screen-printing techniques or dip-coating processes among others. The liquid material is preferably of the sol-gel type, such as suspensions of silica gel (Silica Sol TM50) and methyltrimethoxysilane (MTMS). Alternatively, the liquid material comprises polyimide with a photosensitive compoun...
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