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Mask assembly and mask frame assemble using same

A technology of mask assembly and mask frame, which is applied in the directions of electrical components, electrical solid-state devices, semiconductor devices, etc.

Inactive Publication Date: 2006-05-24
SAMSUNG MOBILE DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there are still problems in terms of robustness and maintaining a desired gap between adjacent unit pattern masks fixed to the frame

Method used

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  • Mask assembly and mask frame assemble using same
  • Mask assembly and mask frame assemble using same
  • Mask assembly and mask frame assemble using same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0026] image 3 is one embodiment of an open mask used in some embodiments of the invention as part of a mask assembly for depositing thin films of organic electroluminescent (EL) devices.

[0027] refer to image 3 One embodiment of the opening mask 30 includes a plurality of openings 33 corresponding to a plurality of unit devices to be formed on a motherboard (not shown). Here, the motherboard refers to a substrate on which an organic EL device can be formed using a mask assembly. In some embodiments, after molding using a mask, each unit device is cut from the motherboard by scribing to form one organic EL device.

[0028] In some embodiments of the present invention, the opening mask 30 includes a plurality of ribs 36 that are parallel with respect to each other, arranged with an equal gap between each rib 36 . Ribs 36 in the column direction (according to image 3 Extending in the y-direction of the coordinate system of ), the plurality of ribs 37 are parallel to eac...

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PUM

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Abstract

The present invention discloses a mask assembly configured to prevent thermal deformation of a mask and maintain a gap between a plurality of divided pattern masks. According to one embodiment, the mask assembly includes: an opening mask having a plurality of first openings arranged in rows or columns; and a pattern mask including a plurality of unit pattern masks. In some embodiments, an end portion of a unit pattern mask including a plurality of mask pattern units configured to be aligned with a plurality of first openings of the open mask may be fixed relative to the open mask. In some embodiments, a pulling force is applied to the unit pattern mask.

Description

technical field [0001] The present invention relates to a mask assembly for depositing a thin film in an organic electroluminescent (EL) device and a mask frame assembly using the mask assembly. Background technique [0002] Self-emissive organic electroluminescence (EL) devices offer advantages of plasma display panels (PDPs), such as wide viewing angle, high contrast ratio, and fast response speed. Therefore, organic EL devices are considered to be next-generation flat panel display devices. Typically, an organic EL device includes an anode, a cathode, and an organic layer with a light emitting layer between these two electrodes. Since the organic layer is easily affected by humidity and cannot be formed by a common photolithography method, the organic layer is formed by deposition. [0003] figure 1 is an exploded perspective view of a conventional mask frame assembly for depositing a thin film included in an organic EL device. [0004] refer t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F1/16C23C14/04G03F1/00H01L51/50H05B33/10
CPCC23C14/042G03F7/70783B05B12/20H10K71/00H10K71/166H05B33/10
Inventor 金义圭金泰亨
Owner SAMSUNG MOBILE DISPLAY CO LTD
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