Substrate processor
A substrate processing device and technology for substrates, which are applied in the fields of electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve the problems of processing liquid recovery, residual processing liquid, and uneven drying of substrates.
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[0031] figure 1 The substrate processing apparatus 10 shown in one embodiment of the present invention is an etching processing apparatus for etching a substrate, such as figure 1 As shown, inside the rectangular parallelepiped housing 11, there is an etching section 12 for etching the substrate B, and a cleaning section 13 for cleaning the substrate B sent out from the etching section 12. 13 Send out the substrate B to the drying section 14 for drying treatment.
[0032] On the upstream side wall 111 ( figure 1 On the right side of ), a substrate delivery port 15 is opened, and a substrate delivery port 16 is opened on the downstream side wall 112 at a position opposite to the aforementioned substrate delivery port 15 . In addition, between the substrate delivery port 15 and the substrate delivery port 16, along the substrate transport direction ( figure 1 A plurality of transport rollers 17 are provided in parallel at equal intervals, and a transport path 171 for transpor...
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