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Method, system and apparatus for mfg. organic electroluminescence device and its display apparatus

A technology for electroluminescent devices and manufacturing equipment, applied in electroluminescent light sources, electro-solid devices, electro-light sources, etc., can solve problems such as equipment cost and installation space difficulties, and achieve improved pretreatment efficiency, improved cost, short intermittent effect of time

Inactive Publication Date: 2004-02-18
SONY CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

But in this case, since the organic layer is composed of multiple reconstituted layers, multiple vacuum chambers are required, so there are difficulties in terms of equipment cost, installation space, etc.

Method used

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  • Method, system and apparatus for mfg. organic electroluminescence device and its display apparatus
  • Method, system and apparatus for mfg. organic electroluminescence device and its display apparatus
  • Method, system and apparatus for mfg. organic electroluminescence device and its display apparatus

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Embodiment Construction

[0023] Now, a method and apparatus for manufacturing an organic EL device and a system and method for manufacturing a display device using an organic EL device according to the present invention will be described based on the accompanying drawings, wherein, figure 1 is a schematic diagram showing one example of the overall structure of the manufacturing facility according to the present invention; Figure 2A with 2B is a schematic diagram showing one example of the structure of the main part of the manufacturing facility; image 3 is a schematic diagram showing an example of the overall structure of an organic EL device manufactured by a manufacturing apparatus; Figure 4 is a schematic diagram showing an example of the overall structure of a conveying jig used in manufacturing an organic EL device; and Figure 5 is a schematic diagram showing an example of the structure of a manufacturing system using a manufacturing apparatus according to the present invention.

[0024] F...

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Abstract

In manufacturing an organic electroluminescence device including a plurality of layers sequentially laminated on a substrate, the plurality of layers are laminated at a film formation portion on the substrate by varying the relative positions of the substrate on which to perform film formation and a plurality of vapor sources arranged side by side so that the substrate passes sequentially through positions corresponding to the plurality of vapor sources.

Description

technical field [0001] The present invention relates to a method and apparatus for manufacturing an organic electroluminescent device (hereinafter referred to as "organic EL device"), and a system and method for manufacturing a display device using the organic EL device. Background technique [0002] In recent years, as a flat type display device, a display device using an organic EL device as a light emitting device (hereinafter referred to as "organic EL display") has attracted attention. An organic EL display is a self-luminous flat panel display that does not require a backlight, and has the advantage of being able to display a display with wide-angle visibility unique to a self-luminous type. In addition, organic EL displays have advantages over backlight types (liquid crystal displays, etc.) because only required pixels need to be turned on, and are considered to have sufficient responsiveness to high-definition high-speed video signals that will be put into use in the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/56H01L51/40H01L51/56H05B33/10
CPCH01L51/56H05B33/10H01L51/001C23C14/568H10K71/164H10K71/40H10K71/50H10K71/00
Inventor 纸山功森敬郎山口优
Owner SONY CORP
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