Projection optical system, exposure apparatus with the same system and exposure method
A projection optical system and image projection technology, applied in the field of exposure devices, can solve the problems of deterioration of imaging performance and the like
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[0054] figure 1 It is an explanatory diagram of the orientation of the fluorite crystallization axis. If reference figure 1 , the crystal axis of fluorite is specified according to the XYZ coordinates of the cubic crystal system. That is, it is respectively stipulated that the crystal axis [100] is along the +X axis, the crystal axis [010] is along the +Y axis, and the crystal axis [001] is along the +Z axis.
[0055] In addition, it is respectively stipulated that: on the XZ plane, the crystal axis [101] is in the direction of 45 degrees between the crystal axis [100] and the crystal axis [001]; on the XY plane, the crystal axis [110] is in the direction of the crystal axis [100] and The crystal axis [010] is in the direction of 45 degrees, and on the YZ plane, the crystal axis [011] is in the direction of the crystal axis [010] and the crystal axis [001] in the direction of 45 degrees. Furthermore, it is specified that the crystal axes [111] are in directions forming equa...
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