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Atomic force microscope measuring method based on angular measurement

An atomic force microscope and angle measurement technology, which is used in measurement devices, scanning probe microscopy, instrument parts, etc. to overcome principle errors and expand the scope of application

Inactive Publication Date: 2007-02-14
TIANJIN UNIV
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Problems solved by technology

[0004] The object of the present invention is to provide a measurement method of atomic force microscope based on angle measurement, which can overcome the principle error and subsequent correction problems introduced by the existing method of measuring the probe deflection of atomic force microscope, and can reduce the impact of the existing method on the Measure the limitations of sample shape, volume, weight, etc., and expand the scope of application of the atomic force microscope

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  • Atomic force microscope measuring method based on angular measurement

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Embodiment Construction

[0010] The AFM measurement method based on angle measurement uses an optical differential angle sensor to detect the change in the rotation angle of the micro-cantilever beam of the atomic force microscope. The light beam is divided into S polarized light and P polarized light. After being reflected, the S polarized light becomes circular polarized light after passing through the 1 / 4 wave plate 5. It is incident on the probe 6 reflective surface of the atomic force microscope, and the circular polarized light reflected from the surface of the AFM probe Polarized light, the circularly polarized light carries the change information of the cantilever beam angle, passes through the 1 / 4 wave plate and becomes P polarized light, and then splits into two mutually orthogonal beams of equal energy after passing through the beam splitter 2, and its polarization state remains unchanged, respectively It is incident into two prisms 1 and 8 arranged along the right angle, and the intensity o...

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Abstract

This invention discloses an atomic force microscope measurement method based on angle measurement, which belongs to the test technique of the signals of atomic force microscope APM probe and cantilever. This method adopts angle sensor by which the rotation angle of the probe is measured and is converted into the electrical signals at a proportion with the angle change value. It gets the angle change of the cantilever caused by the measurement force through signal analysis and process and further to get the surface outline of the object pf the probe.

Description

technical field [0001] The invention relates to an atomic force microscope measurement method based on angle measurement, which belongs to a detection method of a probe / cantilever beam signal of an atomic force microscope (AFM). Background technique [0002] When the end of the cantilever beam is stressed, two deformations will occur at the end, one is deflection and the other is rotation angle. The atomic force microscope uses the probe at the tip of the micro-cantilever beam. When the probe approaches or touches the surface of the object to be measured, there will be a force interaction between the probe and the sample, and the force will cause the micro-cantilever beam to bend. Therefore, The change of the bending amount of the micro-cantilever can be detected in two ways, that is, measuring the change of the deflection of the micro-cantilever of the atomic force microscope, or measuring the change of the tip rotation angle of the micro-canti...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N13/16G12B21/08G01B11/26G01B21/20G01Q60/24
Inventor 刘庆纲李志刚匡登峰李德春王璐李敏
Owner TIANJIN UNIV
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