Dynamic testing loading unit for MEMS disc or device

Abstract

The invention discloses a dynamic test loading device for MEMS wafers or devices. The structure of the device is as follows: a light-transmitting sheet is placed on the opening end surface of a cavity to form a sealed cavity with the cavity, and electrodes are installed on the cavity. There are air charging port, vacuum port and vacuum gauge port, the bracket is fixed on the base of the cavity, the adjusting screw is installed in the base of the bracket, the piezoelectric ceramic is placed in the bracket, the lower end is connected with the adjusting screw, and the upper end is connected with the bracket Then, the support plate is fixed on the bracket, and the disc bead is fixed with the support plate. The device can obtain precise vibration frequency and amplitude through piezoelectric ceramics, and can change the frequency and amplitude in a relatively large range, and is easy to control. It can provide different vacuum degrees for MEMS wafer or device testing. temperature and different vibration state environments.

Description

technical field [0001] The invention relates to a loading device, in particular to a loading device applied to the dynamic testing of MEMS (Micro-electromechanical systems, micro-electromechanical systems) wafers or devices. Background technique [0002] The loading device for the dynamic test of the specimen, that is, the vibrator is a device that converts electrical energy into mechanical energy and provides vibration to the specimen. In recent years, a large number of MEMS devices have appeared and been applied. In order to obtain the modal parameters, it is necessary to load them with excitation and measure their responses. Traditional vibration exciters have been widely used in vibration loading tests of aircraft, missiles, ships, machine tools, bridges, etc., and have also been applied to local components that need to provide vibration and other forms of loading for testing. The disadvantages of traditional loading devices are: ①The application of these loading device...

AI Technical Summary

Problems solved by technology

The disadvantages of traditional loading devices are: ①The application of these loading devices generally requires the sensor to be installed on the specimen, so the specimen needs to have a large enough size, and it is also necessary to ensure that the installation of the sensor is not enough to affect the dynamic test of the specimen The accuracy of the vibration and measurement system provided by these loading devices is not suitable for dynamic testing of tiny specimens, so it is not suitable for small specimens such as MEMS wafers or devices.

②The traditional vibration loading test is carried out in the atmospheric environment or even the harsh working environment, which is not suitable for the dynamic test of the test pieces with strict environmental requirements such as MEMS wafers or devices

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