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Transport system and abnormality control method thereof

An abnormal control and abnormal technology, applied in the direction of electrical program control, comprehensive factory control, conveyor objects, etc., can solve the problems of low operating efficiency, high processing time and high processing cost of the conveying system, and reduce processing time and cost, improve operation efficiency effect

Pending Publication Date: 2022-07-15
CHANGXIN MEMORY TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The application provides a conveying system and its abnormality control method, which is used to solve the technical problem of low operating efficiency of the conveying system due to the high processing time and processing cost when the conveying system is abnormal

Method used

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  • Transport system and abnormality control method thereof
  • Transport system and abnormality control method thereof
  • Transport system and abnormality control method thereof

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Embodiment Construction

[0034] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, but not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0035] The terms "first", "second", "third", "fourth", etc. (if any) in the description and claims of this application and the above-mentioned drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It is to be understood that the data so used may be interchanged under appropriate circumstances such that the embodiments of the application described herein can, for example, b...

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Abstract

The invention provides a carrying system and an abnormity control method thereof.The carrying system comprises an automatic crown block, a first area controller, a first area restorer and a main controller, and the automatic crown block is used for carrying materials by running along a track; the first area controller is used for controlling operation of an automatic crown block in a first area on the track, and the main controller is used for controlling the first area controller; the control method comprises the step that when the first area controller is abnormal or the automatic crown block in the first area operates abnormally, the first area restorer controls the automatic crown block in the first area to move out of the first area through the track.

Description

technical field [0001] The present application relates to the technical field of semiconductor manufacturing, and in particular, to a conveying system and a method for controlling abnormality thereof. Background technique [0002] When manufacturing semiconductors, the handling system is used to transport the required materials to a specific location through an automated overhead hoist transfer (OHT). [0003] The conveying system in the prior art divides the track on which the automated crane runs into a plurality of areas, and each area is provided with an area controller to separately control the automated cranes running in this area. [0004] However, with the prior art, when the area controller is abnormal or the automated crane in the area is abnormal, the operator of the conveying system needs to manually manage the automated crane in the processing area, which greatly increases the handling capacity of the conveying system. The processing time and cost in the event ...

Claims

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Application Information

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IPC IPC(8): G05B19/418B65G63/00H01L21/677
CPCG05B19/41865B65G63/002H01L21/677G05B2219/32252
Inventor 蒯乃明
Owner CHANGXIN MEMORY TECH INC
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