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Triaxial accelerometer

A technology of axial acceleration and X-axis, which is applied in the direction of measuring acceleration, multi-dimensional acceleration measurement, speed/acceleration/shock measurement, etc., to achieve the effect of improving detection accuracy

Inactive Publication Date: 2022-06-10
绍兴圆方半导体有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003]However, the current three-axis accelerometer has the problem of low detection accuracy

Method used

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Embodiment Construction

[0021] Various embodiments of the present application will be described in detail below in conjunction with the accompanying drawings. However, those of ordinary skill in the art can understand that in each embodiment of the application, many technical details are provided for readers to better understand the application. However, even without these technical details and various changes and modifications based on the following embodiments, the technical solutions claimed in this application can also be realized.

[0022] figure 1 A schematic diagram of a top view structure of a three-axis accelerometer provided in an embodiment of the present application, figure 2 It is a schematic diagram of a front view structure of a three-axis accelerometer provided by an embodiment of the present application.

[0023] refer to figure 1 as well as figure 2 , the three-axis accelerometer includes: a substrate 100 and two first anchor points 1 symmetrically arranged on the substrate 10...

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Abstract

The embodiment of the invention relates to the technical field of accelerometers, in particular to a three-axis accelerometer which comprises a substrate and two first anchor points symmetrically arranged on the substrate, the substrate is further provided with a Z-axis detection structure, the Z-axis detection structure comprises a Z-axis mass block, the Z-axis mass block is provided with a cavity, and the Z-axis mass block is provided with a second anchor point. The two first anchor points are symmetrically arranged on the two opposite sides of the cavity in the first direction. The torsion beam is located in the cavity, the first anchor point is connected with the side wall of the Z-axis mass block in the first direction through the torsion beam, the torsion beam coincides with the center line of the cavity, and the torsion beam deviates from the center line of the Z-axis mass block in the first direction; the X-axis detection structure and the Y-axis detection structure are located in the cavity. According to the embodiment of the invention, the detection precision of the triaxial accelerometer can be improved.

Description

technical field [0001] The embodiments of the present application relate to the field of accelerometers, in particular to a three-axis accelerometer. Background technique [0002] An accelerometer is a device for measuring the linear acceleration of a carrier. The mainstream accelerometer on the market is a MEMS (Micro Electro Mechanical systems, Micro Electro Mechanical Systems) accelerometer. MEMS accelerometer is an inertial device based on micro-electromechanical technology. It has the characteristics of small size, high reliability, low cost and suitable for mass production. At present, MEMS accelerometers are mainly capacitive accelerometers, which can calculate acceleration by sensing changes in capacitance with acceleration and converting capacitance changes into displacement changes. [0003] However, the current three-axis accelerometer has the problem of low detection accuracy. Contents of the invention [0004] The embodiment of the present application provid...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/125G01P15/08G01P15/18
CPCG01P15/125G01P15/0802G01P15/18
Inventor 黄占喜周宁宁黄克刚
Owner 绍兴圆方半导体有限公司
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