Methane gas sensor based on optical material and monitoring system
A technology of methane gas and optical materials, applied in the field of micro-nano optics, can solve the problems of short service life, low sensitivity, difficult to achieve accurate monitoring of gas concentration, etc., and achieve the effect of strong applicability and accurate detection data
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[0030] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. Terms such as "up", "down", "left", "right", "middle" and "one" quoted in the preferred embodiment are only for the convenience of description and clarity, and are not intended to limit the scope of the present invention. The scope of implementation, the change or adjustment of the relative relationship, and the technical content without substantial change, shall also be regarded as the scope of the present invention.
[0031] like figure 1 and 2 As shown, the present invention provides a methane gas sensor based on optical materials, comprising a substrate 1, a nano-dielectric column layer 2 and a gas sensing layer 3 sequentially arranged in a stacked structure from bottom to top, and the nano-dielectric column layer 2 is composed of several It is composed of nanometer dielectric pillars 4 distributed in an array, and the upper and lower ends of...
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