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Environment monitoring system

An environmental monitoring system, a technology for environmental samples, applied in the direction of measuring devices, instruments, scientific instruments, etc., can solve the problems of different analysis results, data accuracy, inaccurate test results, etc., to avoid artificial pollution, high accuracy. Effect

Pending Publication Date: 2022-04-01
CHANGXIN MEMORY TECH INC
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

In the process of pre-processing and sampling, it is easy to introduce artificial pollution, which will lead to inaccurate test results; in the process of analysis and data processing, the analysis results of different staff may be different, which will cause data accuracy problems
In addition, it takes a long time to complete manually, and there are problems with the timeliness of the test results, making it difficult to quickly monitor and deal with air pollutants

Method used

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Embodiment Construction

[0024] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be described in detail below with reference to the accompanying drawings. However, those skilled in the art can understand that in each embodiment of the present invention, many technical details are provided for readers to better understand the present application. However, even without these technical details and various changes and modifications based on the following embodiments, the technical solutions claimed in this application can also be realized.

[0025] figure 1 A schematic structural diagram of an environment monitoring system provided by an embodiment of the present invention.

[0026] refer to figure 1 , the environmental monitoring system is used to monitor the concentration of air pollutants in the process area 10 in the clean room, including: there are multiple process areas 10 in the clea...

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Abstract

The embodiment of the invention provides an environment monitoring system, which is used for monitoring the concentration of air pollutants in process areas in a dust-free room, and is characterized in that the dust-free room is internally provided with a plurality of process areas; the sampling device is used for collecting an environmental sample of the processing area; the control device is used for controlling the sampling device to collect a preset environment sample of the processing area; and the analysis device is communicated with the sampling device and is used for analyzing the collected environmental sample. According to the invention, the analysis data of the environmental sample in the specific process area can be quickly obtained, and the accuracy of the analysis data is improved.

Description

technical field [0001] Embodiments of the present invention relate to the field of semiconductors, and in particular to an environment monitoring system. Background technique [0002] With the increasing complexity of semiconductor industry processes and the shrinking of product feature sizes, the impact of air pollutants on products has become a key concern in clean room environmental control. [0003] The existing air pollutant detection steps are mainly completed by the staff manually, and the detection steps can be divided into pre-processing, sampling, analysis and data processing. In the process of pre-processing and sampling, it is easy to introduce artificial pollution, which will lead to inaccurate test results; in the process of analysis and data processing, the analysis results of different staff may be different, which will cause data accuracy problems. In addition, it takes a long time to complete manually, and there are problems with the timeliness of the test...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N1/24G01N33/00
CPCG01N33/00G01N1/24Y02A50/20
Inventor 丁云霄
Owner CHANGXIN MEMORY TECH INC
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