Drainage device for semiconductor process equipment and semiconductor process equipment

Abstract

The drainage device comprises a water collecting box and a drainage mechanism, the drainage mechanism comprises a cylinder body, a piston, a first one-way valve and a second one-way valve, the piston is arranged in the cylinder body in a sliding mode, the piston and the cylinder body can form a temporary storage space, the water collecting box is communicated with the temporary storage space through a water inlet pipe, and the first one-way valve and the second one-way valve are arranged in the water collecting box. The cylinder body is provided with a drainage pipe, and the second one-way valve is arranged on the drainage pipe; under the condition that the piston moves in the first direction, the first one-way valve is opened, and the second one-way valve is closed; under the condition that the piston moves in the second direction, the piston extrudes the temporary storage space so that water in the temporary storage space can drive the first one-way valve to be closed and the second one-way valve to be opened, and the first direction is opposite to the second direction. According to the scheme, the problem that when the water collecting box drains water, the pressure in the water collecting box is unstable can be solved.

Description

technical field [0001] The invention relates to the technical field of semiconductor processing, in particular to a drainage device for semiconductor process equipment and semiconductor process equipment. Background technique [0002] When semiconductor process equipment processes semiconductor devices, it usually needs to be carried out in a process chamber that meets the process environment. The pressure of the process chamber is crucial to the process accuracy of semiconductor devices. [0003] Semiconductor process equipment will generate condensed water during the process. In related technologies, the condensed water generated by semiconductor process equipment needs to be collected in a water collection box through a water inlet pipe. Since the water inlet pipe connects the semiconductor process equipment with the water collection box, the water collection box is only connected with the semiconductor process equipment during the process of collecting condensed water in...

AI Technical Summary

Problems solved by technology

[0004] The invention discloses a drainage device for semiconductor process equipment and semiconductor process equipment to solve the problem that the pressure in the water collection box is unstable when the water collection box is draining water

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