Displacement device

Abstract

According to a displacement device provided by the invention, the mechanical guide rail is adopted to guide the balance mass part, and the displacement device can be normally used without depending on air pressure so that the scheme can be suitable for a vacuum environment. In the vacuum environment, when the moving platform moves in the first horizontal direction, at least the first balance mass part moves in the reverse direction relative to the moving platform in the first horizontal direction to serve as a counter-force guiding mechanism, and when the moving platform moves in the second horizontal direction, and the second balance mass part moves in the reverse direction relative to the moving platform in the second horizontal direction to serve as a counter-force guiding mechanism. Therefore in the vacuum environment, the two balance mass parts in the scheme can counteract the vibration impact influence generated in the moving process of the moving platform in the two directions, and the vibration impact can be counteracted through the balance mass parts when the moving platform in the displacement device moves in the two directions perpendicular to each other. According to the scheme, through a simplified structure, counter-force guiding of the two moving shafts in the vacuum environment is achieved, and cost is reduced.

Description

technical field [0001] The invention relates to the technical field of integrated circuit manufacturing equipment, in particular to a displacement device. Background technique [0002] In the field of automation equipment manufacturing, the large-stroke motion table technology is a core technology that has been highly valued by the industry. In the large-stroke displacement device, the movement of the displacement device often produces a large reverse force, especially in the acceleration and deceleration stages. , which greatly interferes with the positioning accuracy, response speed and stabilization time of the displacement device, so a special balance mass part is required to act as a reaction force guiding mechanism to bear the reverse force and reverse displacement of the displacement device, and to offset the vibration generated during the displacement process Shock effect. The design of the balance mass is based on the principle of conservation of momentum. The dri...

AI Technical Summary

Problems solved by technology

[0003] At present, the existing displacement device has a balance mass design that considers the planar movement under the air bearing support. Although it can meet the role of counter force guidance, because the air bearing support is used, this technical method is limited to the atmospheric environment. It is only effective when used, which limits the scope of application of the displacement device

[0004] Of course, there is also a balance mass design used in a vacuum environment, but the corresponding technology is limited to the balance mass design of a single motion axis, which is mainly used as a reaction force guiding mechanism for the main motion axis, and has no effect on the motion reaction force and displacement of other motion axes. Play the role of counter force guidance, which also limits the scope of application of its technical solutions

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