Piezoelectric micropump array, microsystem and thermal management method of microsystem

Abstract

The invention provides a piezoelectric micropump array, a microsystem and a thermal management method of the microsystem. The piezoelectric micropump array comprises N piezoelectric micropump units which are connected in a distributed mode, and each piezoelectric micropump unit is provided with a first port, a second port, a third port and a fourth port; and the first ports of the N piezoelectric micropump units are connected together through a flow channel, the fourth ports of the N piezoelectric micropump units are connected together through a flow channel, and the third port of the ith piezoelectric micropump unit is connected with the second port of the (i+1) th piezoelectric micropump unit through a flow channel. The N piezoelectric micropump units which are connected in a distributed mode in the piezoelectric micropump array are controlled through external electric signals, the series-parallel connection state of the N piezoelectric micropump units can be effectively changed, the output pressure intensity of fluid can be improved when the N piezoelectric micropump units are used in series, and the input and output flow of the fluid can be improved when the N piezoelectric micropump units are used in parallel. Therefore, the requirements for high flow and high pressure intensity of the microsystem during microfluid heat dissipation can be effectively met, and the heat dissipation effect of the microsystem is improved.

Description

technical field [0001] The invention relates to the technical field of integrated circuits, in particular to a piezoelectric micropump array, a microsystem and a thermal management method for the microsystem. Background technique [0002] As the power of micro-flow supply, micro-pump is the core component of micro-flow control system. Micropumps are very important micro-actuators in the field of microfluidics. They are widely used in biomedical MEMS, chip cooling systems and micro-satellites, etc., especially in the field of biomedical MEMS. Micropumps are used in drug delivery, DNA synthesis, trace Aspects such as fluid supply and precise control play a vital role. The high-efficiency microfluidic cooling technology for a new generation of high-power microsystems requires micropumps that can provide large output flow and high output pressure. The piezoelectric micropump realized by the inverse piezoelectric effect has the advantages of high output pressure, small size, si...

AI Technical Summary

Problems solved by technology

[0003] However, due to the technical bottleneck of piezoelectric micropumps, the working flow and output pressure of a single piezoelectric micropump cannot meet the needs of rapidly developing high-efficiency microfluidic cooling technologies such as micro-spray and micro-channel.

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