High-precision detection method for inner wall of WolterI type X-ray focus lens

Abstract

The invention discloses a high-precision detection method for an inner wall of a WolterI type X-ray focus lens, and belongs to the technical field of X-ray focus lens inner wall non-contact detection. The method comprises the following steps: S5, determining rotation of a main shaft of a lens cone and eccentricity of a vertical shaft by using a laser autocollimator, and recording; S6, adjusting a X displacement table, a long-distance interference measuring head and a focusing type short-distance interference measuring head to proper positions, so that the X displacement table, the long-distance interference measuring head and the focusing type short-distance interference measuring head are in an effective working range; S7, controlling a high-precision air floating main shaft to drive the long-distance interference measuring head and the focusing type short-distance interference measuring head to rotate for a circle, and measuring the roundness of the section; S8, moving a lifting guide rail, and measuring the roundness of a plurality of sections as required; S9, adjusting the position of the X displacement table in real time, and measuring the bus precision by controlling the lifting guide rail; S10, controlling the high-precision air floating main shaft to rotate to a certain angle, and measuring the precision of a plurality of buses; and S11, analyzing the measurement data to obtain the surface shape precision of the inner wall of the lens cone. According to the invention, the axial and circumferential contour measurement of the inner wall of the lens can be realized.

Description

technical field [0001] The invention belongs to the technical field of non-contact detection of the inner wall of an X-ray focusing mirror, and in particular relates to a high-precision detection method for the inner wall of a Wolter I type X-ray focusing mirror. Background technique [0002] In order to study and observe new phenomena of high-energy radiation from celestial bodies such as black holes and neutron stars, observatories and space centers in many countries and regions led by the United States have launched more than ten X-ray astronomical satellites into space. In 1952, German physicist Hans Wolter designed three kinds of Wolter-type X-ray focusing telescopes with grazing incidence satisfying the Abbe sine condition, called Wolter III III focusing telescopes. The Wolter-Ⅰ X-ray telescope is composed of a parabolic internal reflector and a hyperbolic internal reflector. Its advantage is that it can be nested in multiple layers, which is conducive to weak source o...

AI Technical Summary

Problems solved by technology

The integrated detection of the focusing telescope lens is a very critical part of the satellite project. In order to meet the requirements of the working energy area, collection area and angular resolution required by the focusing telescope array index, it is necessary to use #1-45, with a length of 600mm and different diameters. The focusing mirror lens with a maximum diameter of 500mm is assembled together, and the surface roughness requirement is 0.5nm, the surface shape accuracy requirement is 0.2μm, and the thickness of the thinnest lens is only 0.2mm, which is easily deformed. This technical index is It is extremely difficult to realize and complete, so it puts forward higher requirements for the accuracy and stability of the detection system

Since the optical surface is the inner surface of the mirror shell, the existing general-purpose measuring instruments cannot directly detect the surface shape accuracy

Traditional measurement methods have poor accuracy and low efficiency, which cannot meet the needs of fast and high-precision detection. At the same time, it is easy to cause deformation of large-sized ultra-thin lenses, which cannot guarantee non-destructive testing.

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