Preparation method of combined gas-conducting graphite electrode and quartz crucible without inner surface bubble group

A technology of graphite electrodes and quartz crucibles, applied in glass manufacturing equipment, manufacturing tools, electric heating devices, etc., can solve the problems of melting of the lower end of the quartz tube sheath, foreign objects falling into the quartz crucible, and defects of condensate bubble groups. , to avoid silica coagulation, reduce oxidation consumption and prolong life

Active Publication Date: 2022-05-03
ADVANCED QUARTZ MATERIAL (HANGZHOU) CO LTD
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Problems solved by technology

This method can achieve no condensate on the one side of the graphite electrode facing the gas blowing tube, but the single side of the graphite electrode facing away from the gas blowing tube will still deposit more condensation and fall into the quartz crucible to cause bubble group defects
The second is to install a quartz tube sheath in the silica condensation area of ​​the graphite electrode. Using the same material as the silica vapor and the quartz sheath, it can be firmly attached to the quartz sheath without falling into the quartz crucible. When making a quartz crucible, in order to ensure a relatively uniform temperature, it is necessary to lower the position of the graphite electrode for melting. At this time, the lower end of the quartz tube sheath is easily melted and falls into the quartz crucible, causing the crucible to be scrapped.

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  • Preparation method of combined gas-conducting graphite electrode and quartz crucible without inner surface bubble group

Examples

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preparation example Construction

[0042] see figure 1 , the embodiment of the present invention also provides a method for preparing a quartz crucible without bubbles on the inner surface, using a combined gas-conducting graphite electrode, comprising the following steps:

[0043] Step 1, forming the quartz sand raw material into the inner wall of the graphite crucible to form a quartz crucible, installing a combined gas-conducting graphite electrode, and connecting the upper graphite electrode 10 and the lower graphite electrode 20;

[0044] Step 2: use the lower section graphite electrode 20 to strike the arc and heat the quartz crucible to melt the quartz crucible, and pass the protective gas into the axial air hole 12. The pressure of the protective gas is controlled at 0.2-0.7Mpa, so that The protective gas of the upper graphite electrode 10 passes through the inner wall side of the upper graphite electrode 10 to the outer wall side of the upper graphite electrode 10, and forms a 360 ° surrounding air flo...

Embodiment 1

[0049] Example 1: Taking the melting of a 32-inch quartz crucible as an example, three conventional graphite electrodes with a diameter of 65 mm are used for melting. After the melting is completed, the longitudinal length of the electrode head without silica vapor condensate is measured, and 50 sets of data are continuously measured. Take L from 50 sets of data min 85mm is used as the design length of the lower dense electrode. Combined gas-conducting graphite electrodes are used, the diameter of the upper graphite electrode 10 and the lower graphite electrode 20 is φ65mm, the length of the upper graphite electrode 10 is 600mm, the diameter of the axial pores 12 is φ12mm, and the through-hole porosity of the lower graphite electrode 20 is 30%~ 35%, the ash content of the upper graphite electrode 10 is 0.03%, the length of the lower graphite electrode 20 is 85mm, and the density of the lower graphite electrode 20 is 1.74g / cm 3 , the ash content of the lower graphite electrode...

Embodiment 2

[0051] Embodiment 2: Taking the melting of a 32-inch quartz crucible as an example, three conventional graphite electrodes with a diameter of 60 mm are used for melting. After the melting is completed, the longitudinal length of the electrode head without silica vapor condensate is measured, and 50 sets of data are continuously measured. Take L from 50 sets of data min 82mm is used as the design length of the lower dense electrode. Combined gas-conducting graphite electrodes are used, the diameter of the upper graphite electrode 10 and the lower graphite electrode 20 is φ60mm, the length of the upper graphite electrode 10 is 600mm, the diameter of the axial pores 12 is φ10mm, and the through-hole porosity of the lower graphite electrode 20 is 20%~ 30%, the ash content of the upper graphite electrode 10 is 0.03%, the length of the lower graphite electrode 20 is 82mm, and the density of the lower graphite electrode 20 is 1.74g / cm 3 , the ash content of the lower graphite electr...

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Abstract

A combined gas-conducting graphite electrode, comprising an upper graphite electrode and a lower graphite electrode, the lower end of the upper graphite electrode is provided with a cylindrical connection protrusion, and the upper end of the lower graphite electrode is provided with a cylindrical connection groove. The outer side of the connecting protrusion is provided with an external thread, and the inner side of the cylindrical connecting groove is provided with an internal thread. The cylindrical connecting protrusion is threaded with the cylindrical connecting groove, and the upper end of the upper graphite electrode is provided with an axial Pores, the axial pores do not pass through the upper graphite electrode, and the density of the lower graphite electrode is greater than 1.72g / cm 3 , the through-hole porosity of the upper graphite electrode is 20% to 35%, and a two-section combined graphite electrode is adopted. The upper graphite electrode adopts a high-purity and highly gas-permeable graphite electrode, and the lower graphite electrode adopts a high-purity and high-density graphite electrode, reducing The invention solves the problem of high cost caused by the high replacement frequency of the graphite electrode in the lower section, and also provides a method for preparing a quartz crucible without bubble groups on the inner surface.

Description

technical field [0001] The invention relates to the technical field of quartz crucible production, in particular to a method for preparing a combined gas-conducting graphite electrode and a quartz crucible without inner surface bubble groups. Background technique [0002] Quartz crucible is usually an important accessory for Czochralski method (CZ method) to pull single crystal silicon rods. Quartz crucible plays an irreplaceable role as the carrier of silicon material and silicon liquid. [0003] The usual preparation method of the quartz crucible is to distribute the quartz sand evenly according to a certain thickness in the graphite crucible with a straight cylinder, a round bottom, and an R corner connecting the straight cylinder and the round bottom, and heat the quartz sand by energizing the graphite electrode to generate arc heat. At the same time, a quartz crucible is formed by pumping and depressurizing the quartz sand at a specific time by a vacuum pump. The prepa...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H05B7/085C03B20/00
CPCH05B7/085C03B19/066
Inventor 王建军何玉鹏邓红李卫李常国
Owner ADVANCED QUARTZ MATERIAL (HANGZHOU) CO LTD
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