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Multifunctional system and method for preparing two-dimensional material micro-nano device

A two-dimensional material and multi-functional technology, applied in nanostructure manufacturing, nanotechnology, nanotechnology, etc., can solve the problems of high price, large volume, and poor compatibility with the use environment, and achieve low price, good compatibility, and multiple realizations. The effect of functional reuse

Pending Publication Date: 2021-11-30
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] At present, there are two-dimensional crystal material dry transfer systems on the market, but these transfer systems have the disadvantages of large volume, poor environmental compatibility, and high price.
In terms of metal electrode deposition, the mask plate alignment system on the market also has disadvantages such as high price and poor environmental compatibility.

Method used

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  • Multifunctional system and method for preparing two-dimensional material micro-nano device
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  • Multifunctional system and method for preparing two-dimensional material micro-nano device

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Effect test

Embodiment 1

[0036] like figure 1 As shown, the present invention provides a multifunctional system for the preparation of two-dimensional material micro-nano devices. The multifunctional system includes a fixed base 1 , a displacement module 2 , an adapter plate 3 , a multifunctional conversion module 4 , a base fixed rotation module 5 , and screw holes 6 .

[0037] like figure 2 As shown, the single-axis translation stage includes a lower panel 7 , an upper panel 13 , an adjustment shaft 90 , a screw 91 , a screw fixing sleeve 10 , a screw jack 8 , a guide rail 11 , and a tension spring 12 . Each single-axis translation stage can independently realize linear movement in X, Y, and Z directions. The rotation adjustment shaft 90 can drive the screw rod 91 to move, and the movement of the screw rod 91 can push the top column of the screw rod to move, thereby driving the movement of the upper panel of the single-axis translation stage. The tension spring produces a force that is opposite ...

Embodiment 2

[0043] The first is the dry transfer of 2D crystalline materials.

[0044] like Figure 5-6 As shown, the cleaned Si / SiO 2 The base is fixed on the base fixed rotating module of the multifunctional system, and the PDMS glued with the two-dimensional crystal material is fixed on the lower surface of the multifunctional conversion sheet of the multifunctional system. Under microscope observation, adjust the displacement module of the multifunctional system (including the X, Y, Z directions of the single-axis translation stage) and the levelness or inclination angle of the multifunctional conversion plate; use the base to fix the rotation module to adjust the two-dimensional crystal material and Si / SiO 2 The relative angle between the substrates; under the above operation, adjust the 2D crystal material and Si / SiO 2 The relative position and distance between the substrates, and making the 2D crystal material and Si / SiO 2 The base is close; if Figure 7 As shown, adjust the r...

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Abstract

The invention provides a multifunctional system and method for preparing a two-dimensional material micro-nano device. The multifunctional system comprises a mounting and fixing base, a displacement module, a multifunctional conversion module and a substrate fixing and rotating module. The mounting and fixing base can fix and support the whole multifunctional system. The displacement module can independently move linearly in the X direction, the Y direction and the Z direction, and positioning and alignment operation between a two-dimensional crystal material sample and a substrate can be achieved conveniently. The multifunctional conversion module realizes function switching between two-dimensional crystal material transfer and metal electrode deposition only under the condition that a multifunctional conversion sheet is replaced. The substrate fixing and rotating module not only can fix the substrate, but also can perform rotating operation to adjust the relative angle between a mask plate for two-dimensional crystal material or metal deposition and the substrate, so that the system has better flexibility in material transfer and metal electrode deposition.

Description

technical field [0001] The present invention relates to the technical field of key technology for the preparation of two-dimensional material micro-nano devices, to the technical field of dry transfer of two-dimensional layered crystal materials, to the technical field of metal electrode deposition for micro-nano devices, and in particular to a method for two-dimensional material micro-nano devices Prepared multifunctional systems and methods. Background technique [0002] Atomic-thick two-dimensional layered crystal materials have attracted extensive research attention due to their rich electrical, optical, magnetic, and mechanical properties. The two-dimensional crystal materials required for the research are mainly obtained by chemical vapor synthesis (CVD) and tape mechanical stripping. Tape mechanical exfoliation of two-dimensional crystal materials often has the advantages of convenient operation, high preparation efficiency, less sample contamination, and high crysta...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B82B3/00B82Y40/00
CPCB82B3/0004B82B3/0042B82B3/0047B82B3/0052B82Y40/00
Inventor 王曾晖梁亚春朱健凯肖飞
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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