Large-aperture optical element high-speed detection system based on ultrafast microscopic imaging

A technology for optical components and microscopic imaging, which is used in optical instrument testing, optical performance testing, and machine/structural component testing. The effect of adjusting the method is simple

Active Publication Date: 2021-11-09
CHONGQING UNIV
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Problems solved by technology

[0003] The present invention provides a high-speed detection system for large-diameter optical components based on ultra-fast microscopic imaging to solve the problem of the narrow performance detection range and low efficiency of current optical components. The problem

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  • Large-aperture optical element high-speed detection system based on ultrafast microscopic imaging
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  • Large-aperture optical element high-speed detection system based on ultrafast microscopic imaging

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[0036] In order to enable those skilled in the art to better understand the technical solutions in the embodiments of the present invention, and to make the above-mentioned purposes, features and advantages of the embodiments of the present invention more obvious and understandable, the following describes the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings For further detailed explanation.

[0037] In the description of the present invention, unless otherwise specified and limited, it should be noted that the term "connection" should be understood in a broad sense, for example, it can be a mechanical connection or an electrical connection, or it can be the internal communication of two elements, it can be Directly connected or indirectly connected through an intermediary, those skilled in the art can understand the specific meanings of the above terms according to specific situations.

[0038] see figure 1 , is a ...

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Abstract

The invention provides a large-aperture optical element high-speed detection system based on ultrafast microscopic imaging. The system is characterized in that a first coupler sends one path of wide-spectrum ultrafast pulse laser to a microscopic imaging device, and the other path of the wide-spectrum ultrafast pulse laser is sent to a second coupler through a delay line; a microscopic imaging device divides the wide-light-path ultrafast pulse laser into a plurality of parallel incident light signals with different wavelengths, the parallel incident light signals are vertically incident to different positions of an optical element to be measured, and spatial light signals reflected back or transmitted out from the different positions of the optical element to be measured are transmitted to the second coupler; the second coupler is used for coupling the wide-spectrum ultrafast pulse laser subjected to delay processing with the spatial light signal to generate an interference signal; a dispersion compensation optical fiber performs time domain stretching on the interference signal; a detector converts the interference signal after time domain stretching into an interference electric signal; and an acquisition and processing device determines instantaneous phases of different positions on the optical element to be measured at any moment according to the acquired interference electric signals. The system is wide in detection range and high in efficiency.

Description

technical field [0001] The invention belongs to the field of ultrafast microscopic imaging, in particular to a high-speed detection system for large-diameter optical elements based on ultrafast microscopic imaging. Background technique [0002] At present, when performing performance testing on optical components, such as detecting deformation of optical components, a single incident light signal is usually used to detect each position to be detected on the optical component one by one, and the detection range is narrow and the efficiency is low. Contents of the invention [0003] The invention provides a high-speed detection system for large-diameter optical elements based on ultrafast microscopic imaging to solve the problems of narrow performance detection range and low efficiency of the current optical elements. [0004] According to the first aspect of the embodiments of the present invention, a high-speed detection system for large-aperture optical components based o...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/02
CPCG01M11/02G01M11/0271G01M11/0278
Inventor 高磊刘艾彭琛朱涛
Owner CHONGQING UNIV
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