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High-stability monocrystalline silicon differential pressure sensor

A high-stability, monocrystalline silicon technology, applied in the field of sensors, can solve problems such as difficult removal of parts

Active Publication Date: 2021-09-03
安徽允昊物联网科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The accommodation space on the pressure chamber of the high-stability monocrystalline silicon differential pressure sensor is filled with pressure-guiding medium, and the sensing block of the device will be worn out during long-term use, and the pressure-guiding medium is easy to expand and contract due to temperature , if there is a crack in the wear of the sensing block, the pressure-guiding medium will be sprayed out through the damaged crack of the sensing block, and it is difficult to remove when it adheres to other parts of the equipment

Method used

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Examples

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Embodiment 1

[0027] see Figure 1-Figure 5 , a high-stability monocrystalline silicon differential pressure sensor, its structure includes a connector 1, an operation box 2, and a base 3, the operation box 2 is provided with a connector 1, and the connector 1 is movably connected with the operation box 2 , the base 3 is installed on the operation box 2, and the operation box 2 is connected to the base in 3 directions;

[0028] The operation box 2 is provided with an oil filling pipe 2a, an electrical block 2b, a box body 2c, a pressure chamber 2d, and an operator 2e. The inside of the box body 2c is provided with an oil filling pipe 2a, and the oil filling pipe 2a is embedded with the box body 2c. Together, the electrical block 2b is installed on the box 2c, the box 2c is movably connected with the electrical block 2b, the operator 2e is installed on the box 2c, and the box 2c is connected to the operator 2e The pressure chamber 2d is installed inside the box body 2c, and the box body 2c ...

Embodiment 2

[0036] see Figure 1-Figure 6 , a high-stability monocrystalline silicon differential pressure sensor, its structure includes a connector 1, an operation box 2, and a base 3, the operation box 2 is provided with a connector 1, and the connector 1 is movably connected with the operation box 2 , the base 3 is installed on the operation box 2, and the operation box 2 is connected to the base in 3 directions;

[0037] The operation box 2 is provided with an oil filling pipe 2a, an electrical block 2b, a box body 2c, a pressure chamber 2d, and an operator 2e. The inside of the box body 2c is provided with an oil filling pipe 2a, and the oil filling pipe 2a is embedded with the box body 2c. Together, the electrical block 2b is installed on the box 2c, the box 2c is movably connected with the electrical block 2b, the operator 2e is installed on the box 2c, and the box 2c is connected to the operator 2e The pressure chamber 2d is installed inside the box body 2c, and the box body 2c ...

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Abstract

The invention discloses a high-stability monocrystalline silicon differential pressure sensor which structurally comprises a connector, an operation box and a base, the connector is arranged on the operation box, the connector is movably connected with the operation box, the base is installed on the operation box, the operation box is connected with the base, the operation box is provided with an oil filling pipe, the oil filling pipe is embedded into box body, an electric block is installed on box body, and the box body is movably connected with electric block. If the sensing block is replaced, the plugging device can be pulled by the sensing block in the process of taking out the sensing block, when the plugging device is pulled, the plugging device leaves the groove in the medium box, the cavity capacity of the medium box is enlarged, and due to the increase of the medium volume, the pressure guide medium flows into the groove of the medium box firstly, and when the sensing block is taken out, the medium cannot be jetted out from the mounting opening.

Description

technical field [0001] The invention relates to the field of sensors, in particular to a high-stability single crystal silicon differential pressure sensor. Background technique [0002] High-stability monocrystalline silicon differential pressure sensor is a detection device that can sense the measured information and convert the sensed information into electrical signals or other required forms of information output according to certain rules to meet the information requirements. transmission, processing, storage, display, recording and control requirements; [0003] The accommodation space on the pressure chamber of the high-stability monocrystalline silicon differential pressure sensor is filled with pressure-guiding medium, and the sensing block of the device will be worn out during long-term use, and the pressure-guiding medium is easy to expand and contract due to temperature , If the wear of the sensing block has a rupture, the pressure-guiding medium will be spraye...

Claims

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Application Information

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IPC IPC(8): G01L13/06G01L19/00
CPCG01L13/06G01L19/00
Inventor 郑志扬
Owner 安徽允昊物联网科技有限公司
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