Three-dimensional force flexible tactile sensor based on eddy current and piezoelectric principle coupling

Abstract

The invention relates to a three-dimensional force flexible tactile sensor based on eddy current and piezoelectric principle coupling. The three-dimensional force flexible tactile sensor comprises a quadrangular frustum pyramid-shaped body of a hollow structure and a single excitation coil located in the body. The side faces of the quadrangular frustum pyramid are defined by PVDF films. The top surface of the quadrangular frustum pyramid is formed by a metal thin layer; the bottom surface of the quadrangular frustum pyramid is composed of a flexible substrate; the excitation coil is of a planar spiral structure and is located under the metal thin layer; and the excitation coil inputs sine alternating current and outputs impedance signals. The advantages of large dynamic response range of eddy current type tactile sensing and high sensitivity of piezoelectric type tactile sensing are utilized, processing and manufacturing are carried out through the micromachining technology, the purposes of being simple in structure, small in size and capable of detecting contact force are achieved, and the sensor can be applied to the fields of bionic manipulators, artificial limbs and the like.

Description

technical field [0001] The invention belongs to the field of tactile sensing and relates to a three-dimensional force flexible tactile sensor based on the coupling of eddy current and piezoelectric principles. Background technique [0002] The sense of touch is an important sense when organisms are in contact with the outside world. Human beings can use this sense to feel the shape, texture, quality and temperature of objects. Since intelligence is an important direction for the development of robots in the future, robots need reliable tactile sensing capabilities To accurately and appropriately manipulate objects in unstructured and complex environments, the development and application of tactile sensing technology is an important part of the development of intelligent robots, and is widely used in medical rehabilitation, health detection, mechanical grasping and security measurement and many other fields. At present, the working principles of tactile sensors mainly includ...

AI Technical Summary

Problems solved by technology

At present, most tactile sensors are mostly based on one of the principles, which makes the sensor unable to take into account the large response range and high sensitivity at the same time, which limits the practical application of tactile sensors.

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