Substrate transport device and operation method for substrate transport device

A technology of substrate conveying and substrate

Pending Publication Date: 2021-07-23
KAWASAKI HEAVY IND LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

There are cases where it is difficult to detect the positional deviation of a wafer whose inclination angle is very small by the mapping device and the wafer positional deviation device installed near the wafer entrance and exit.
The mapping device and the wafer position offset device have room for improvement

Method used

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  • Substrate transport device and operation method for substrate transport device
  • Substrate transport device and operation method for substrate transport device
  • Substrate transport device and operation method for substrate transport device

Examples

Experimental program
Comparison scheme
Effect test

Deformed example 1

[0109] Next, edge reference Figure 7 and Figure 8 A modified example of the substrate transfer device 101 according to the first embodiment will be described.

[0110] In the substrate transfer apparatus according to Modification 1 of Embodiment 1, the first light projecting section of the substrate detector is configured to project light downward.

[0111] Figure 7 and Figure 8 It is a schematic diagram showing a schematic configuration of main parts of a substrate transfer apparatus according to Modification 1 of Embodiment 1. FIG. exist Figure 7 2 shows a substrate detector 60 configured such that the first light receiving unit 62 receives light reflected on the main surface of the substrate 1 when the substrate 1 is normally stored in the container 102 . exist Figure 8 2 shows a substrate detector 60 configured so that the first light receiving unit 62 does not receive light reflected on the main surface of the substrate 1 when the substrate 1 is normally stored ...

Embodiment approach 2

[0120] In addition to the substrate transfer device according to Embodiment 1, the substrate transfer device according to Embodiment 2 is provided with a surveying device at the front end of the robot, and the surveying device has a second light projecting unit that projects light in the horizontal direction. , and a second light receiving unit that receives light projected from the second light projecting unit, the control device is configured to obtain, from the surveying device, positional information that the second light receiving unit has not detected the light projected from the second light projecting unit as the position of the substrate The information is based on the position information of the substrate acquired from the surveying device, and the manipulator is operated so that the manipulator is positioned below a first distance previously set from the lower surface of the substrate.

[0121] In addition, in the substrate transfer device according to Embodiment 2, ...

Embodiment approach 3

[0133] Such as Figure 10 and Figure 11 As shown, the robot system 200 includes a substrate transfer device 201 and a container 112 as a mounting table. In this robot system 200 , by accommodating the substrate 1 in the container 112 , the substrate 1 is placed on the stage. The container 112 may be, for example, a FOUP (Front Opening Unified Pod) or a quartz boat.

[0134] Figure 10 The left-right direction and the up-down direction in , indicate the front-back direction and the up-down direction of the substrate transfer device 201 . in addition, Figure 11 The left-right direction of represents the front-back direction of the substrate transfer device 201 . Figure 11 The up-down direction of is downward means that the left-right direction of the substrate transfer device 201 is leftward.

[0135] The substrate 1 is, for example, a substrate of a semiconductor device such as a semiconductor substrate or a glass substrate. The substrate 1 is, for example, a circular...

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PUM

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Abstract

A substrate transport device 101 that holds and transports a substrate 1. The substrate transport device 101 comprises a hand 20 that holds the substrate 1, a manipulator 30 to which the hand 20 is attached, and a substrate detector 60 that is arranged on the hand 20 and detects the distance to a principal surface of the substrate 1. The substrate detector 60 is preferably arranged at a tip end part of the hand 20. The substrate detector 60 is preferably an electrostatic capacitance sensor.

Description

technical field [0001] The invention relates to a substrate conveying device and an operating method thereof. Background technique [0002] Multiple processes are done in a clean room to manufacture semiconductor wafers. In the manufacture of semiconductor wafers, semiconductor wafers are accommodated in carriers (conveying chambers) and transported. [0003] Furthermore, there is known a substrate processing apparatus for detecting positional displacement of a wafer in a transfer chamber. For example, Patent Document 1 discloses such a substrate processing apparatus. [0004] The substrate processing apparatus disclosed in Patent Document 1 includes a mapping device and a wafer misalignment detection device. The mapping device and the wafer position deviation detection device are installed at the wafer entrance and exit of the transfer bay opener that opens and closes the door of the transfer bay. [0005] The surveying device includes a plurality of pairs of a light pr...

Claims

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Application Information

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IPC IPC(8): B25J13/08H01L21/677H01L21/67
CPCH01L21/67259H01L21/67766H01L21/67778H01L21/68707H01L21/67265B25J11/0095B25J13/089B25J19/02
Inventor 斋藤雅行福岛崇行
Owner KAWASAKI HEAVY IND LTD
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