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Large-aperture and low-distortion F-theta ultraviolet field lens device

A large aperture, ultraviolet field technology, used in optical components, optics, instruments, etc.

Pending Publication Date: 2021-05-18
嘉兴谱鉴精密仪器有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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  • Large-aperture and low-distortion F-theta ultraviolet field lens device

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Embodiment Construction

[0038]The present invention will be described in detail below with reference to the specific embodiments. The following examples will help to further understand the present invention in any form of technicrat, it will be further understood by those skilled in the art. It should be noted that several variations and improvements can be made without departing from the concept of the present invention without departing from the present invention. These are all of the scope of protection of the present invention.

[0039]A large aperture, low distortion F-Theta ultraviolet field, specific:

[0040]The large aperture, low distortion F-Theta ultraviolet field lens, characterized in that the design wavelength is 355 nm, the design focal length is 160 mm, the incident light beam diameter design value is 12mm, the design scan angle is ± 25 degrees, and the incident apertive aposphive mirror The center distance of the first lens is 14 mm to 35 mm.

[0041]The large aperture, low distortion F-THETA ultr...

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Abstract

The invention provides a large-aperture and low-distortion F-theta ultraviolet field lens device. The large-aperture and low-distortion F-theta ultraviolet field lens device comprises a first lens, a second lens, a third lens, a fourth lens and a fifth lens. The first lens, the second lens, the third lens, the fourth lens and the fifth lens are sequentially arranged from the laser incidence direction to the focusing plane. The first lens is a plano-concave lens or a convex-concave lens which is concave towards the laser incidence direction. The second lens is a meniscus concave-convex lens protruding towards the focusing plane. The third lens and the fourth lens are biconvex lenses. The fifth lens is a biconcave lens or a plano-concave lens. The large-aperture and low-distortion F-theta ultraviolet field lens provided by the invention realizes large-view-field, low-distortion and high-quality scanning on the premise of effectively ensuring the diameter of an incident beam.

Description

Technical field[0001]The present invention relates to laser assemblies, laser cutting, and other laser processing areas, and in particular, a F-THETA ultraviolet field lens device such as a large pore diameter and low distortion.Background technique[0002]The existing F-Theta ultraviolet lens is multi-(- +++) four lens configurations, except for the first piece of lens, and the remaining lenses come to light aggregation effects, which is essentially unfavorable to expand the scanning range of field lens.[0003]Patent Document CN101236291 A discloses a distinctuous F-THETA optical lens and an optical system including first, two, three, four-lens, first lens, a double concave negative lens, and the first lens in the inlet direction. The second lens is a curved positive lens toward the incision side; the third lens is a flat convex or bifurcous positive lens; the fourth lens is a convex or double convex positive lens. Further, the light of the light of each lens is preferably satisfied w...

Claims

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Application Information

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IPC IPC(8): G02B13/00
CPCG02B13/0005
Inventor 谷朝臣韩进厚程昊谷朝榜秦文材
Owner 嘉兴谱鉴精密仪器有限公司
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