ZnO-based electrothermal film doped by Al<3+>, Ga<3+> and Ag<3+>, and preparation device and method thereof

Abstract

The invention discloses an electrothermal film, and specifically provides a ZnO-based electrothermal film doped by Al<3+>, Ga<3+> and Ag<3+>, and a preparation device and method thereof. The ZnO-based electrothermal film doped by Al<3+>, Ga<3+> and Ag<3+> is safe and environment-friendly in preparation process, low in cost, good in electrical conductivity, high in transmittance, uniform and adjustable in film thickness and high in quality. The invention solves the problems that a large amount of acid mist is generated in a conventional preparation process of an electrothermal film, pollution is serious, the prepared film is poor in quality and serious in power attenuation and the like in the prior art. The structural formula of the electrothermal film is Zn<1-x>M<x>O. The preparation device comprises a box body and a motor arranged on the box body, wherein the motor drives a quartz tube substrate in the box body to rotate, a heating module is arranged in the box body, an ultrasonic spray head and a precursor liquid inlet are arranged on the parts, corresponding to the quartz tube substrate, of the box body, and the ultrasonic spray head atomizes the precursor liquid from the precursor liquid inlet and uniformly coats the surface of the quartz tube substrate.

Description

technical field [0001] The present invention relates to an electrothermal film, in particular to a high-quality Al film with a safe and environmentally friendly preparation process, low cost, good electrical conductivity, high transmittance, uniform and adjustable film thickness, and high quality. 3+ , Ga 3+ 、Ag + Doped ZnO-based electrothermal film, preparation device and method. Background technique [0002] In the field of electric heating, there are three types of resistance heating, electromagnetic induction heating and microwave heating, among which resistance heating is the most widely used. There are various heating elements in resistance heating, such as electric heating wire, electric heating tube, electric heating plate, quartz tube, PTC electric heating element, etc. Except for PTC electric heating element, other heating elements use electric heating wire as their internal heat source. The method has lasted for more than 100 years. In recent years, electric h...

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Problems solved by technology

[0006] The present invention mainly provides a kind of safe and environment-friendly preparation process, low cost, good electrical conductivity of electrothermal film, high transmittance, uniform and adjustable film thickness, and high quality Al 3+ , Ga 3+ 、Ag + The doped ZnO-based electrothermal film, preparation device and method solve the technical problems in the prior art that a large amount of acid mist will be generated during the preparation of the electrothermal film, serious pollution, poor film quality, and serious power attenuation.

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