Caching platform, wafer turnover device and turnover method of device

Abstract

The invention provides a caching platform, a wafer turnover device and a turnover method of the device. The caching platform comprises a loading platform for loading a wafer box and a transfer platform for temporarily placing a wafer rack. The loading platform is provided with at least one uncovering position and a plurality of loading positions, wherein the uncovering positions are used for loading wafer boxes. The space above the uncovering position is enough to enable the cover of each wafer box to be turned over to be opened and closed. The transfer platform and the uncovering position arearranged in a staggered manner, so that the wafer box and the wafer rack cannot interfere with each other in placement and carrying. A controller in the wafer turnover device automatically realizes carrying and turnover of the wafer boxes and the wafer rack by controlling a mechanical arm. The mechanical arm can replace manpower to achieve uncovering at the uncovering position, the transfer platform can provide a buffer space for the mechanical arm between the caching platform and the process equipment, the round-trip frequency of the mechanical arm is reduced, and the carrying efficiency ofwafers is improved.

Description

technical field [0001] The invention relates to the technical field of transportation equipment, in particular to a buffer platform, a wafer turnover device and a turnover method thereof. Background technique [0002] In the semiconductor industry, a wafer is a circular high-purity silicon wafer, which is the basis for manufacturing various electronic chips. During the storage and handling of wafers, a dedicated wafer rack is generally used to stack multiple wafers. Due to the particularity of the wafer material, it cannot be exposed to the air for a long time, so the wafer rack needs to be sealed and placed in the wafer box. [0003] Wafers have a multi-step processing process during the fabrication process, so they need to be turned over between multiple process equipment. Wafer boxes are usually placed on electronic shelves. At present, the turnover platform is configured on the mobile trolley. There are multi-layer brackets on the turnaround platform to be fully load...

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide a cache platform to solve the problems of low wafer handling and turnover efficiency caused by the need to frequently go back and forth between the turnover platform and the process equipment in the prior art

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