Graphene waveguide type terahertz pulse energy detection device
A technology of terahertz pulse and detection device, which is applied in the field of terahertz pulse energy detection, can solve the problem of lack of highly sensitive terahertz pulse energy detection means, etc., and achieve the effect of high sensitivity
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Embodiment 1
[0021] The invention provides a graphene waveguide type terahertz pulse energy detection device. Such as figure 1 As shown, the graphene waveguide type terahertz pulse energy detection device includes a substrate 1 , a first fixing part 2 , a second fixing part 3 , a sensing part 4 , a first waveguide part 5 and a second waveguide part 6 . The first fixing part 2 and the second fixing part 3 are placed on the base 1, the first fixing part 2 and the second fixing part 3 are made of insulating material, and the material of the base 1 is silicon dioxide. The first waveguide part 5, the sensing part 6, and the second waveguide 7 are connected in sequence to form a waveguide structure, so that terahertz electromagnetic waves propagate along the waveguide structure. One end of the first waveguide part 5 of the waveguide structure is fixed on the first fixing part 2 . That is to say, one end of the first waveguide part 5 is fixed on the first fixing part 2 , and the other end of th...
Embodiment 2
[0026] On the basis of Example 1, such as figure 2 As shown, a first connecting part 7 is provided between the first waveguide part 5 and the sensing part 4, and the material of the first connecting part 7 is graphene. The width of the first connecting portion 7 is smaller than the widths of the first waveguide portion 5 and the sensing portion 4 . A second connection part 8 is provided between the second waveguide part 6 and the sensor part 4, and the material of the second connection part 8 is graphene. The width of the second connecting portion 8 is smaller than the widths of the second waveguide portion 6 and the sensing portion 4 . The number of graphene layers in the first connection part 7 and the second connection part 8 is less than 10 layers. The sensing part 4 is rectangular. In this way, on the one hand, when the terahertz pulse to be measured irradiates the sensing part, the sensing part 4 generates heat. The width of part 6 and sensing part 4, less heat is t...
Embodiment 3
[0030] On the basis of Example 2, such as image 3 As shown, the sensing part 4 includes a first trapezoidal part and a second trapezoidal part, the short bases of the first trapezoidal part and the second trapezoidal part are opposite, and the first trapezoidal part and the second trapezoidal part communicate with the first connecting part 7 and the second trapezoidal part. Two connecting parts 8 . In this way, the length of the first connecting part 7 and the second connecting part 8 is increased, and the heat generated by the sensing part 4 is more difficult to conduct to the first waveguide part 5 or the second waveguide part 6, thereby changing the sensing part more. The dielectric constant of part 4 is improved, thereby improving the sensitivity of terahertz pulse energy detection.
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