Filter design method and filter, multiplexer, communication equipment
A filter design and filter technology, applied in the field of filters, can solve problems such as deterioration, and achieve the effect of improving insertion loss characteristics
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[0058] In the embodiment of the present invention, the thickness and width of the raised part provided at the connection end and the non-connection end of the top electrode of the resonator in the filter series resonator, parallel resonator and bandwidth adjustment unit are limited, further improving The insertion loss characteristics of the filter are described in detail below.
[0059] figure 2 It is a structural schematic diagram of a thin film bulk acoustic resonator provided with raised parts at both the connecting end and the non-connecting end of the top electrode. image 3 for figure 2 The cross-sectional view of the position of PP' in . Such as figure 2 and image 3 As shown, a resonator with elevated portions includes a substrate 601 , an acoustic mirror 602 , a bottom electrode 603 , a piezoelectric thin film layer (piezoelectric layer) 604 , a top electrode 605 and an elevated portion 606 . Among them, the optional material of the substrate 601 is single cr...
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